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Table of Contents
ZEISS
SmartSEM User Interface.......................................................................... 52
Graphical Control Elements ...................................................................... 53
User Access Levels and User Privileges...................................................... 54
SmartSEM Program Suite ......................................................................... 55
Graphical Control Elements ...................................................................... 58
Energizing the Microscope ....................................................................... 61
Obtaining a First Image ........................................................................................ 64
6.2.1
Preparing the Specimen Holder ................................................................ 65
Loading the Specimen Chamber............................................................... 66
Selecting the Gun Mode .......................................................................... 74
Measuring the Probe Current ................................................................... 75
Changing the Extractor Voltage ............................................................... 76
Working with Different Aperture Configurations and Beam Modes ..................... 76
6.4.1
Determining the Installed Aperture Configuration | Gemini I Column........ 76
Selecting the Column Mode ..................................................................... 77
Setting up the InLens SE Detector ............................................................ 78
Setting up the VPSE Detector ................................................................... 80
Setting up the EsB Detector ..................................................................... 81
Setting up the SESI Detector .................................................................... 82
Setting up the aBSD/BSD Detector ........................................................... 83
Setting up the aSTEM/STEM Detector....................................................... 85
Setting up the CL Detector....................................................................... 88
Working with Variable Pressure ............................................................................ 88
6.6.1
Changing to VP Mode.............................................................................. 89
Finishing the Work Session....................................................................... 90
De-energizing the Microscope.................................................................. 91
Performing a Lockout/Tagout................................................................... 91
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000