ZEISS
6 Operation | 6.5 Finding Appropriate Detector Settings
6.5.5 Setting up the EsB Detector
The EsB detector can be used to collect the backscattered electrons (BSE) signal. The BSE signal
contains information about the material contrast. In the final image, heavy elements are repre-
sented by brighter pixels and light elements are represented by darker pixels.
By adjusting the filtering grid, energy-selected BSE images can be obtained. If the filtering grid
voltage is set to 0, SE and BSE mixed images can be acquired.
Fig. 33: Silver nanoparticles embedded in zeolite, imaged at 1.5 kV
The following settings are recommended for the EsB detector:
Typical WD
Filtering Grid
500 V – 10 kV
0–5 mm
EsB Grid > 400 V to filter out the SE signal
20 V – 500 V
0–3 mm
EsB Grid = 0 V for use as an additional SE de-
tector
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. From the
Signal A
drop-down list, select
ESB
.
3. Adjust the EHT, working distance (WD), and EsB Grid according to the suggestions in the
table in order to optimize the image.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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