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ZEISS
8 Troubleshooting | 8.1 Overview
8 Troubleshooting
8.1 Overview
The following table provides hints for solving common problems. If you cannot solve the problem
or if you are unsure about a certain technical difficulty, contact your local ZEISS service represen-
tative.
Symptom
Cause
Measure
Drift: specimen seems to
be moving.
§
Charging effects.
§
Nonconductive specimen.
§
Ensure proper conduction
of the specimen.
§
Optimize specimen prepa-
ration.
§
Apply a charge compensa-
tion method.
Stub not correctly fixed by
screw.
Fix the stub correctly.
CAN communication has
failed.
Refer to
.
The workstation has
crashed.
CAN communication has
failed.
Refer to
.
FIB: Emission is unstable.
Ion source needs to be regen-
erated.
Refer to
Ion source may be used up ( >
3000 μAh).
Contact the ZEISS service rep-
resentative to have the ion
source replaced.
FIB: No emission.
Ion source needs to be regen-
erated.
Refer to
Ion source may be used up.
Contact the ZEISS service rep-
resentative to have the ion
source replaced.
FIB: No image.
Aperture position is not cor-
rect.
Initialize the FIB aperture in
the
FIB
tab of the
FIB Control
panel.
Align the aperture in the
Align
tab of the
FIB Control
panel.
Column conditions have dete-
riorated, charging effects oc-
cur.
Start a purging process in the
Options
tab of the
FIB Con-
trol
panel.
Gun valve is closed.
Open the gun valve in the
FIB
tab of the
FIB Control
panel.
FIB: Emission current is
too high (e.g. 4 or 5 μA)
for more than 30 min.
Ion source needs to be regen-
erated.
Refer to
Automatic regulation of the
emission current is deacti-
vated.
Activate the
Regulate
check-
box in the
FIB
tab of the
FIB
Control
panel.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
95