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10 Technical Data and Conformity | 10.1 Product Specification
ZEISS
Parameter
Description
Conditioning inter-
val
Time between conditioning cycles:
72 hours
Imaging/Pattern-
ing
Maximum field of view:
580 × 580 µm
User beam shift:
±15 µm
Dwell time
Minimum dwell time
: 25 ns
Maximum dwell time:
1 s
Lenses
Type:
Two electrostatic lenses
Beamblanking
Built-in, electrostatic
Focus
Control:
Coarse and fine control
Stigmator
Type:
Eight pole electrostatic
Apertures
Number:
14 mechanical aperture positions, motorized for fast and ul-
tra high reproducibility. No realignment required after aperture
change. Continuous probe current adjustment between aperture posi-
tions available via condenser lens.
Control:
Software control for automatic operation
Specimen Chamber and Stage
Parameter
Description
Specimen chamber
dimensions
§
330 mm inner diameter
§
270 mm height
Free accessory
ports
18 (for EDS, EBSD, SIMS, manipulators etc.)
Chamber Viewing
Two color CCD cameras with IR and white-light illumination provided
as standard
Analytical working
distance
8.5 mm
Coincidence point
5 mm (SEM), 13.5 mm (FIB)
Column arrange-
ment
The angle between electron-optical and focused ion beam-column is
54°.
EDS Take-off An-
gle:
35°
Specimen stage
Type:
6-axes motorized super-eucentric, controlled via the SmartSEM
user interface, operated by a dual joystick control box
Mounting:
Drawer-type door
Movements:
§
X/Y = 100 mm
§
Z = 50 mm
§
M = 13 mm
§
Tilt = −4 to 70°
§
Rotation = 360° continuous
112
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000