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ZEISS
4 Software Description | 4.2 SmartFIB
Program
Description
SmartFIB
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Main tool for online/live work on the microscope
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Milling/etching/deposition of patterning elements
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Provides the following modes:
– Live Mode: Mainly used for editing patterns and structures and
creating recipes
– Sample Mode: Mainly used for creating recurring/automated
workflows
– EPD Mode: Used for thickness determination of a TEM lamella
Designer
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Offline creation of layouts: Arrangement of elements in the scan-
ning area
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Interaction with Sample Mode: Used as a drawing tool for Sample
Mode
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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