![background image](http://html.mh-extra.com/html/zeiss/crossbeam-350/crossbeam-350_instruction-manual_927679025.webp)
ZEISS
3 Product and Functional Description | 3.1 System Overview
Optional
Components and
Accessories
4
3
2
1
5
6
7
8
9
Fig. 7: Optional components and accessories
1
Multichannel Gas Injection System (GIS) for up to 5 precursor materials on a single flange
Refer to instruction manual Multi GIS
2
Annular STEM detector (aSTEM) for transmission imaging and quality control. Two differ-
ent models are available (aSTEM4, aSTEM1). Detection of up to 4 channels in parallel is
possible.
3
Local charge compensator for SEM imaging and analysis of non-conductive specimens
Refer to instruction manual Charge Compensator
4
Electron flood gun for ion beam preparation of non-conductive specimens
Refer to instruction manual Flood Gun
5
Single needle GIS for high angle specimen access
Refer to instruction manual UniGIS
6
Micro-manipulator for specimen modification and probing
7
aBSD detector for high efficiency BSE detection and angle selective material characteriza-
tion.
8
EsB detector for finest z resolution without topographic artifacts and unique material
contrast
9
Airlock with optional navigation camera (80 mm or 200 mm wide) for fast and efficient
specimen transfer and fast pumping times
Refer to the respective instruction manual 80 mm Airlock or 200 mm Airlock
Further options:
§
Control panel
§
Plasma Cleaner
Refer to instruction manual Plasma Cleaner
§
Energy-dispersive X-ray spectrometer (EDS) for chemical analysis
§
EBSD for crystallographic mapping
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
25