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10 Technical Data and Conformity | 10.1 Product Specification
ZEISS
10 Technical Data and Conformity
10.1 Product Specification
Electron Optics
Parameter
Description
SEM resolution
GEMINI column in High Resolution configuration (max. probe current
20 nA)
Optimum working distance
§
§
0.9 nm at 15 kV
§
1.7 nm at 1 kV
§
2.5 nm at 0.2 kV
Coincidence point (WD 5 mm)
§
1.1 nm at 15 kV
§
2.3 nm at 1 kV
Analytical Condition (10 nA,
WD 5 mm)
§
2.3 nm at 20 kV
GEMINI column in High Current configuration (max. probe current
100 nA)
Optimum working distance
§
§
1.1 nm at 15 kV
§
1.9 nm at 1 kV
§
3.8 nm at 0.2 kV
Coincidence point (WD 5 mm)
§
1.3 nm at 15 kV
§
4.2 nm at 1 kV
Analytical Condition (10 nA,
WD 5 mm)
§
2.7 nm at 20 kV
Acceleration volt-
age
Range:
20 V to 30 kV
Adjustment:
Continuously variable in 10 Volt steps
Probe current SEM
High Resolution configuration:
5 pA to 20 nA
High Current configuration:
12 pA to 100 nA
Magnification
Range:
12x to 2,000,000x (SEM) referenced to Polaroid image format
Adjustment:
Continuously variable in either coarse or fine modes
Auto-Compensation:
Magnification is precisely corrected automati-
cally for changes in working distance or acceleration voltage
Electron source
Filament:
Schottky field emitter
Alignment:
Two stage electromagnetic emitter alignment utilizing
emission imaging mode
Automatic emitter run-up:
Safe controlled run-up to the target
emitter conditions
Indicators:
Status information in software to indicate all emitter pa-
rameters
Objective lens
Patented GEMINI I electromagnetic/electrostatic objective lens system
(68º conical final-lens) with water cooling for best thermal stability
and reproducibility
Hysteresis correction:
Built-in, for the removal of lens hysteresis
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000