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6 Operation | 6.5 Finding Appropriate Detector Settings
ZEISS
1. From the
Panel Configuration Bar
, select
BSD Control
.
The
BSD Control
panel enables you to change the polarity of the segments, select BSD
modes, and set the BSD gain.
à
The
BSD Control
panel is displayed.
2. In the
BSD Control
panel, click
BSD in
to insert the aBSD detector.
à
The stage is lowered by 20 mm to give space for the detector to be inserted.
à
The detector is inserted.
3. In the Crossbeam SEM Control panel, select the Imaging tab.
4. From the
Signal A
drop-down list, select aBSD1 or aBSD4 A depending on your detector
type and configuration.
INFO:
A
refers to the video channel. B, C, and D are also available if you have the four-
channel version.
5. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6. In the
BSD Control
panel, click a quadrant symbol to toggle its status between on (white),
inverted (black), and off (gray).
7. To choose the respective mode, click
BSD: COMPO
or
BSD: TOPO
.
The default setting for BSD is
BSD: COMPO
. All six segments (S1–S6, aBSD) or four seg-
ments (S1–S4, BSD) are set to
on
and an image that is high in atomic number contrast is
obtained.
The default mode for
BSD: TOPO
is S3 on, S4 on, S5 inv and S6 inv (aBSD) and S1 on, S2
8. If you want to change the default setting to
BSD: TOPO
, click
BSD: Set TOPO
.
9. From the BSD Gain drop-down list, select
Low
,
Medium
,
High
, or
Very High
.
INFO:
Since the detector has a limited speed, it is recommended to use scan speed 6 or
higher (slower), especially at small magnifications. The lower the gain is, the faster is the
detector.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000