3 Product and Functional Description | 3.2 Main Components
ZEISS
3.2.4.5 Chamber CCD Camera
Purpose
The microscope contains a CCD camera (charge-coupled device camera) inside the specimen
chamber. It is referred to as the chamber CCD camera or chamberscope. It allows you to monitor
the position of the specimen stage and particularly the distance between the objective lens and
the specimen holder.
The chamber CCD camera is located at the backside of the specimen chamber. A second CCD
camera can be installed on the left-hand side of the specimen chamber.
1
2
3
Fig. 14: Sample image from chamber
CCD
camera.
1
Objective lens of the SEM column
2
Objective lens of the FIB column
3
Specimen holder
NOTICE
Risk of property damage: Risk of collision
Use the chamber CCD camera to monitor the position of the specimen holder during stage
movements. Pay particular attention to the distance between the objective lens and the top of
the specimen. This applies to vertical movements, but also to horizontal movements, because a
thick specimen may collide with the objective lens from the side.
The chamber CCD camera has two illumination modes. The chamber can be illuminated either
with white light or with infrared light. Infrared light gives a grayscale image, whereas white light
gives a color image. In standard settings the mode is automatically selected, depending on the
imaging mode and the selected detectors. White light limits the performance of most detectors.
Therefore infrared illumination is a fallback if white light cannot be used. The performance of
diode detectors is negatively affected by infrared light. If a diode detector is selected, then by de-
fault the chamber CCD camera is disabled. The automatic selection of the illumination mode can
be manually overwritten by the user.
The image of the chamber CCD camera can be adjusted by the user:
§
Brightness, contrast, and CCD illumination can be optimized to improve the image.
§
Certain display details can be chosen by zooming in and shifting. This can be achieved by
turning the Magnification and Shift X or Shift Y knobs on the control panel, respectively.
Info
It is highly recommended that the CCD illumination control is set to
Auto Detect
. This avoids
any problems by the user forgetting to switch the illumination back for a different detector.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
