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ZEISS
10 Technical Data and Conformity | 10.1 Product Specification
Parameter
Description
INFO: The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Accessory ports:
Two accessory ports on the stage door are pro-
vided
Specimen weight:
Up to 0.5 kg
Specimen current monitor
with integrated touch alarm (audible
touch alarm warning with on-screen message)
Specimen mounts:
One carousel 9x specimen holder for 13 mm di-
ameter stubs included in base tool configuration; various specimen
holders available as option
Detection System
Parameter
Description
Detection system
Detection system equipped for parallel detection and signal process-
ing of multiple detector channels.
4 detector channels (default), up to 12 detector channels (optional)
2 TV inputs (default), up to 4 TV inputs (optional)
Detector Control
Automatic Contrast/Brightness
Manual Contrast/Brightness
Parallel detection, processing, and display of up to 4 channels
Detector Selection and Mixing:
Select between up to 12 detector
channels and up to 3 TV inputs (optional). Any two detector signals
can be mixed for enhanced image information. TV Camera image and
detector images can be displayed simultaneously.
InLens detectors
InLens SE detector:
High efficiency annular scintillator detector mounted in GEMINI col-
umn with optically coupled photomultiplier
EsB detector (optional):
Column-mounted high efficiency scintillator detector with optically
coupled photomultiplier for detection of energy and angle selective
backscattered electrons. Filtering grid adjustable from 0 V to −1.5 kV
for contrast adjustment.
Chamber detectors
SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V
High efficiency variable pressure SE detector (VPSE, optional):
For SE detection under variable pressure conditions
SESI detector (replaces the Everhart-Thornley SE detector, op-
tional):
Combined Secondary Electron Secondary Ion (SESI) detector based on
a scintillator photomultiplier system; easy change between secondary
ion and secondary electron mode by converting the electrode voltage
aSTEM detector (optional):
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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