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6 Operation | 6.6 Working with Variable Pressure
ZEISS
6.5.9 Setting up the CL Detector
The CL detector is optionally available.
The CL detector collects visible or ultraviolet light and is especially useful for internal structural ex-
aminations of rocks, ceramics, and semiconductors.
Fig. 37: Zircon grains
The following settings are recommended for the CL detector:
Typical WD
5 kV – 30 kV
6–10 mm
(min. 4 mm)
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. From the
Signal A
drop-down list, select
CL
.
3. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6.6 Working with Variable Pressure
VP mode offers the possibility of analyzing and mapping non-conducting, strongly gassing or
moist specimens without any need for specimen preparation.
The partial pressure in the specimen chamber can be set in the range 0.1–0.6 mbar.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000