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3 Product and Functional Description | 3.2 Main Components
ZEISS
Signal Detection
When the primary electron beam hits the specimen, certain interaction products are released,
which can be recorded by specific detectors, e.g. the InLens SE detector
6
. For more informa-
tion see
Principle of Signal Detection [
3.2.2.1 Beam Modes
With the GEMINI column, different beam modes are available:
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High Resolution Imaging
Optimized for highest resolution imaging applications
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Normal
Standard imaging and analytical mode with high flexibility for different applications
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Depth of Field
Improved depth of field when combined with small apertures (< 60 µm)
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Minimum Probe Current
Smallest possible probe currents for low dose applications
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Fisheye
Very large field of view at an EHT of 100 V. Larger working distances are suggested
§
Widefield
Large field of view with the InLens detector. Requires the SmartSEM software license
Field
Mode
3.2.3 Ion-sculptor Focused Ion Beam (FIB) Column (Optional)
Purpose
The Ion-sculptor Focused Ion Beam (FIB) column is the part of the microscope, where ions are
emitted, accelerated, focused, and deflected.
1
2
3
4
5
Fig. 10: Schematics of the ion optics
1
Ion source
Liquid metal ion source of gallium (Ga⁺).
2
Variable apertures
3
Ion beam
4
Objective lens
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Specimen
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000