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10 Technical Data and Conformity | 10.2 Installation Requirements
ZEISS
10.2.2 System Layout
4
ca. 1800 (Cr
ossbeam 550) / 1880 (Cr
ossbeam 550 L)
ca. 1578
765
330
(1440)
838
1
2
3
4
5
5
1
1
4
2
5
Fig. 38: System layout
1
Ion-sculptor FIB (+ 200 mm airlock)
2
Table + PC
3
Static damping block
4
Pre-vacuum pump
5
Description
Size (mm) appr.
Distribution of
load (kg)
Footprints
Ion-sculptor FIB
940 × 1070 × 1800
4 × 250
4 × Ø 80 mm
Ion-sculptor FIB
+ 200 mm airlock
1080 × 1070 × 1800
4 × 260
4 × Ø 80 mm
1650 × 1000 × 838
or
1100 × 1000 × 838
4 × 24.3
4 × Ø 50 mm
118
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000