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ZEISS
10 Technical Data and Conformity | 10.2 Installation Requirements
Description
Size (mm) appr.
Distribution of
load (kg)
Footprints
Static damping block
180 × 180 × 160
1 × 12.0
180 mm × 180 mm
Pre-vacuum pump
432 × 265 × 295
1 × 24.5
200 mm × 180 mm
FIB rack
560 × 810 × 1600
4 × 50
on wheels
Chiller (optional, water- or air-cooled)*
530 × 640 × 740
4 × 22.5
on wheels
Compressor*
281 × 139 × 239
1 × 25.0
281 mm × 139 mm
*Actual measurements are country dependent (different manufacturers).
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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