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6 Operation | 6.5 Finding Appropriate Detector Settings
ZEISS
6.5.6 Setting up the SESI Detector
The SESI detector is optionally available and replaces the chamber SE detector.
The SESI detector enables you to acquire both secondary electron images and FIB secondary ion
images.
Fig. 34: Intergranular corrosion in an nickel based superalloy
The following settings are recommended for the SESI detector:
§
Settings when working in SE mode, secondary electron imaging,
FIB mode = SEM
:
Typical WD
Collector Voltage
100 V – 30 kV
2–12 mm
Typically 5 mm
§
Adjustable from 0 V to +1500 V
§
Best detection: +300 V to +400 V
§
Settings when working in SE mode, secondary electron imaging,
FIB mode = FIB
:
Typical WD
Collector Voltage
2 kV – 30 kV
Coincidence point
§
Adjustable from 0 V to +1500 V
§
Best detection: +300 V to +400 V
§
Settings when working in ion mode, secondary ions imaging,
FIB mode = FIB
:
Typical WD
Collector Voltage
2 kV – 30 kV
Coincidence point
§
Adjustable from −4 kV to +0 kV
§
Best detection: Around −4 kV
1. In the
FIB Toolbar
, from the
Imaging Mode
drop-down list, select an imaging mode, e.g.
FIB mode = SEM
.
2. In the Crossbeam SEM Control panel, select the Imaging tab.
3. From the
Signal A
drop-down list, select
SESI
.
à
By default, secondary electrons are detected.
4. In order to detect secondary ions, in the Imaging tab, activate the
SESI Mode
checkbox.
5. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions
in the table in order to optimize the image.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000