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ZEISS
11 Parts and Tools | 11.1 Consumables
11 Parts and Tools
NOTICE
Risk of property damage: Spare parts and consumables
Using spare parts or consumables that are not provided by ZEISS can lead to property damage.
4
Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing
the microscope.
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Contact your ZEISS service representative for information regarding how to order spare
parts and consumables.
4
Unless otherwise authorized by ZEISS, all spare parts and consumables must be installed by
a ZEISS service representative.
11.1 Consumables
Required Parts/Tools
Part Number
Schottky field emitter (gun) by DENKA
000000-0302-460
Multihole aperture
On request
Anode aperture
On request
Extractor aperture
348520-0097-001
Anode aluminum seal
348520-0266-001
Copper seal gun head (single use)
000000-0546-290
Tip seal for pre-vacuum pump BOC Edwards
XDS 10
000000-0113-989
Scintillator for SE detector
348306-8142-000
Ion source (gallium)
360100-0000-540
With GIS upgrade: Precursors
On request
11.2 Spare Parts
Required Parts/Tools
Part Number
Chamber door O-ring
000000-0476-960
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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