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3 Product and Functional Description | 3.3 Optional Components and Accessories
ZEISS
3.3.1.4 aBSD Detector
Purpose
The aBSD detector is a pneumatically retractable annular backscattered electron detector. It is
used for high efficiency and angle selective material characterization even at low-kV applications.
It has six separate diode segments, two inner concentric rings and four outer quadrants. The inner
segments provide mostly material contrast whereas the four outer quadrants provide more topo-
graphical contrast.
Fig. 21: The
detector with two inner concentric segments and four outer quadrants
NOTICE
Risk of property damage: Motorized specimen stage
Risk of damaging the detector when operating the motorized specimen stage.
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Retract the detector head completely after you have finished the work with the detector.
Info
Risk of malfunction: The diode segments are sensitive to the light that is used for illumination
in TV mode (infrared and white).
When you use a diode detector, always make sure that the TV illumination is switched off. If
the CCD Mode is set to Auto Detect, then the TV illumination is automatically switched off
when a diode detector is used.
The BSD detector has applications mainly in materials analysis and in the life sciences.
Material analysis:
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Metallurgical sections
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Geological sections
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Complex materials
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Printed circuit boards
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Semiconductors
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Bond pads
Life sciences:
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Mineral deposits in plant structures
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Bone structures
The BSD detector is available either with one video output channel (BSD1) or with four video out-
put channels (BSD4). With BSD4 you can collect four channels in parallel, which can be displayed
in Quad mode. Each channel can have an arbitrary combination of segments. This way, you can
collect compositional images, topographical images, and custom combinations all at once.
Four channels are especially useful in combination with the program 3DSM, which provides a
topographical reconstruction of the specimen. The program 3DSM acquires four images of the
specimen and acquires each of these images with a different quadrant of the detector. This results
in four images from four different directions. With the BSD4 detector you can acquire these four
images all at once. An algorithm then calculates the topographic surface.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000