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ZEISS
Table of Contents
Table of Contents
Explanation on Warnings and Additional Information ...........................................
Safe Operation Conditions ....................................................................... 13
Requirements for Personnel ..................................................................... 13
Safe Handling of Spare Parts .................................................................... 14
Emergency Off (EMO) Option................................................................... 18
Lockout/Tagout Equipment ...................................................................... 20
Electron Optical Column | Gemini I ........................................................... 30
Ion-sculptor Focused Ion Beam (FIB) Column (Optional) ........................... 32
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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