Zeiss Crossbeam 350, Инструкция по эксплуатации

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3 Product and Functional Description | 3.2 Main Components ZEISS
Signal Detection
When the primary electron beam hits the specimen, certain interaction products are released,
which can be recorded by specific detectors, e.g. the InLens SE detector
6
. For more informa-
tion see Principle of Signal Detection [
}
34] .
3.2.2.1 Beam Modes
With the GEMINI column, different beam modes are available:
§
High Resolution Imaging
Optimized for highest resolution imaging applications
§ Normal
Standard imaging and analytical mode with high flexibility for different applications
§
Depth of Field
Improved depth of field when combined with small apertures (< 60 µm)
§
Minimum Probe Current
Smallest possible probe currents for low dose applications
§
Fisheye
Very large field of view at an EHT of 100 V. Larger working distances are suggested
§ Widefield
Large field of view with the InLens detector. Requires the SmartSEM software license Field
Mode
3.2.3 Ion-sculptor Focused Ion Beam (FIB) Column (Optional)
Purpose The Ion-sculptor Focused Ion Beam (FIB) column is the part of the microscope, where ions are
emitted, accelerated, focused, and deflected.
1
2
3
4
5
Fig. 10: Schematics of the ion optics
1 Ion source
Liquid metal ion source of gallium (Ga⁺).
2 Variable apertures
3 Ion beam
4 Objective lens
5 Specimen
32 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000