Zeiss Crossbeam 350, Инструкция по эксплуатации

Страница: 39 / 126

ZEISS 3 Product and Functional Description | 3.2 Main Components
Fig. 15: Chamber CCD camera disabled as indicated by a pause sign (e.g. if a diode detector is
selected).
3.2.5 Specimen Stage
Purpose The motorized eucentric specimen stage is used to navigate the specimen inside the specimen
chamber.
Position The specimen stage is mounted on the chamber door. If the chamber door is closed, the speci-
men stage is inside of the specimen chamber.
1
2
Fig. 16: Specimen stage with dovetail fitting for precise fitting
1 Specimen holder
2 Specimen stage
Operating
Principle
When moving a tilted stage in X/Y direction, no displacement (moving out of focus) occurs. When
a pre-tilted specimen holder is used, X/Y movements require an adjustment of the Z position to
stay in focus.
The stage can be operated using the Dual Joystick [
}
40] or using the SmartSEM software.
Axis Description Movement
X X-axis Movement towards or away from the cham-
ber door (horizontal movement in the image)
Y Y-axis Movement
Z Height Vertical movement (movement towards or
away from the focal plane of the image)
M Height Movement of the specimen surface into the
tilt axis at various working distances
R Rotation Stage rotation parallel to the X-Y plane
T Tilt Stage tilt about an axis parallel to the X axis
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000 39