Zeiss Crossbeam 350, Инструкция по эксплуатации

Страница: 26 / 126

3 Product and Functional Description | 3.2 Main Components ZEISS
§ SESI detector for Secondary Electron and Secondary Ion imaging
Refer to SESI Detector [
}
42]
§ CL detector for the analysis of cathodoluminscent materials
Refer to CL Detector [
}
49]
§ Nanopatterning and Visualization Engine (NPVE) for advanced patterning and lithography
tasks
Information will be provided by the manufacturer
§
Electrostatic Beam Blanker for SEM
Refer to instruction manual Beam Blanker
§
Rapid Laser Ablation Upgrade
Refer to instruction manual Rapid Laser Ablation Upgrade
§
Time-of-flight secondary ion mass spectrometer (TOF-SIMS)
Refer to instruction manual TOF-SIMS
§ Further options on request
3.2 Main Components
3.2.1 Vacuum System
Purpose For operation of the microscope, the gun head, the column, and the specimen chamber have to
be evacuated. The vacuum is essential to operate the gun and to prevent collisions of electrons
with gas molecules.
1
2
3
4
5
6
7
8
9
11
12
13
14
15
16
10
Fig. 8: Schematics of the vacuum system
1 Gun with filament
2 Gun head
3 Multihole aperture
4 Column chamber valve
26 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000