ZEISS
6 Operation | 6.5 Finding Appropriate Detector Settings
The following settings are recommended for the InLens SE detector:
Typical WD
Recommended WD
20 V – 10 kV
0–5 mm
Short working distances are preferable for
good detection efficiency
10 kV – 20 kV
2–5 mm
Info
Avoid strong specimen tilting for the InLens SE detector.
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. From the
Signal A
drop-down list, select
InLens
.
3. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6.5.3 Setting up the SE Detector
The SE detector collects the SE signal, highlighting the topography of the specimen.
Fig. 31: An eledone tentacle
The following settings are recommended for the SE detector:
Typical WD
Collector Voltage
500 V – 5 kV
2–8 mm
§
Adjustable from −250 V to +400 V
§
Standard applications: +300 V
At a high magnification, you can opti-
mize the image by varying the collector
voltage.
§
Pseudo-backscattered (BSE) image:
−250 V to −50 V
This produces a topogaphic image of the
sample with no material contrast.
5 kV – 30 kV
min. 6 mm
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. From the
Signal A
drop-down list, select
SE2
.
3. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions
in the table in order to optimize the image.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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