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Hitachi S-4100 FieldD Emission Scanning Electron Microscope
General Information:
Hitachi field emission scanning electron microscope converted to electron
beam writing by using nanometer pattern generating system (NPGS)
Equipment Specifications:
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Resolution: 15
€
o
A
at 30 KV
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Magnification: 20 to 300,000x
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Electron gun: Cold-‐cathode field emission electron gun