11 ADJUSTMENT METHODS
LCM1010 Instruction Manual
11.2 Vacuum regulator (Option)
Final vacuum pressure can be controlled by adjusting the vacuum regulator.
Raise the press to the FM position through manual operation.
A CAUTION
Before adjusting the vacuum regulator, set and chuck a substrate
and release film.
(1) Loosen the regulator handle, and close the circuit.
ft
*
(2) Select “M ANU” with the select button Г at the front o f die press.
*!»
(3) Select “FM ” with the select button 2 at the front o f the press.
(4) Press [OPE] (press front operation switch). The leak valve closes.
(5) Press [UP] (press front operafion switch). The FM slow valve opens.
(6) Press [DOWN] (press front operation switch). The m ain valve opens.
(7) Tighten the regulator handle gradually to adjust the regulator so that the pressure
indication o f the vacuum pressure gauge at the top o f the press becomes a target
value.
11-12
TCWA
Содержание LCM1010
Страница 9: ...1 GENERAL INFORMATION LCM 1010 Instruction Manual TCWA...
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Страница 174: ...LCM1010 Instruction Manual 2 SAFETY NOTE The f gure below is for use with four Press Modules Automatic T WA 2 39...
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Страница 193: ...4 OPERATION SWITCHES AND BUTTONS LCM 1010 Instruction Manual T WA...
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Страница 433: ...LCM 1010 Instruction Manual 4 INSTALLATION NOTE The figure below is for use with four Press modules Automatic TCWA 4 5...
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Страница 528: ...APPEND APPENDIX 1 4 CHARGE NUMBERLIST TSWA APPENDI...
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