System Options: Patterning
7-18
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
Serial Patterning
All patterns defined on the screen are processed
consecutively
; milling / deposition is completed on one pattern
before moving to the next one. This is the default patterning mode.
Parallel Patterning
All patterns defined on the screen are processed
concurrently
; one pass of the beam is completed on all patterns
before moving on to the second pass. Parallel patterning is typically used to avoid a redeposition of material on adjacent
areas.
With parallel patterning, the mill time is recalculated to include all the patterns that are shown in the image
window.
When a user switches to the Parallel mode, the following pattern properties in the group must be the same:
Gas
Type
and
Passes
. The first selected pattern determines these values for all the other patterns.
Other properties (
Application
,
Z size, Overlap
,
Saturation Sputter Rate
and
Refresh Time
) are also all set to those of the
first selected pattern to avoid confusion, even though they can theoretically remain unchanged. Restoring Serial
mode does not undo these changes; the properties remain as in the Parallel mode.
Progress area
Information updated as the milling progresses can be found here
(captions change according to a running process):
•
Total Time
– estimated total patterning time
•
Overall Progress
– related to the total patterning time of all
patterns
•
Current Progress
/
CCS Line Progress
– related to the actual pattern in progress
Note
When patterning is paused in one display, it is possible to start patterning in another one. Similarly, when patterning
finishes, there may still be a paused patterning in another display.
It is possible to acquire an image from the signals generated during patterning. All imaging parameters are dictated
by the patterning requirements. Much better images can be acquired by a Snapshot during patterning. In this case,
patterning is paused, an image is grabbed, and patterning resumes.
Note
If the magnification is too high, creating certain patterns can use too much memory needed for the control system to run.
The pattern corners become round, and the edges become jagged. A good rule of thumb is to pick a magnification where
your pattern fills 35-50% of the screen.
