System Options: Patterning
7-21
C O N F I D E N T I A L
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User Manual
Revision A
Feb 2018
Gas Injection module (option)
Patterns have many associated parameters, such as the gas that
can optionally be used during patterning to deposit the desired
material. The gas is delivered by a Gas Injection System (GIS) on
the sample surface.
As different applications require different gases, there can be more
GIS’s installed on your system. One can select an Application file
for a given pattern in the Patterning property editor. It automatically
sets the appropriate GIS, the dwell time and overlap and calculates the proper dose appropriate to the beam
chemistry. A pattern must be defined before the material file is selected.
The GIS can be selected manually, but note that overlap, dwell time and an appropriate gas type should be set
carefully to avoid disappointing results.
Setting up the GIS
The
Gas Injection
module enables control of the installed GIS’s. A
Gas
type is allocated to each GIS (several injectors may be mounted
according to the configuration, its color depends on the gas type).
A tooltip info is given about the selected GIS line:
•
Port #
– GIS connection position
•
Lifetime –
time of GIS employment
Right-clicking on the installed GIS module line opens a context
menu.
Before patterning with the GIS starts, the gas reservoir must be
heated by selecting the
Heat
column context menu /
Warm
item.
The
Cold
status is replaced by a progress bar, which in turn is
replaced by the
Warm
status when the GIS is fully heated. To cool
down a reservoir, proceed in reverse order.
To insert the GIS needle manually, click on the
Insert
check box (a
tick mark). A confirmation dialog appears. Clicking on the
Insert
check box again retracts (clear box) the GIS.
C a u t i o n !
Confirm the needle insertion only if you are sure that nothing obstructs its travel.
Beware of stage moves while the GIS is inserted! The GIS needle can be damaged by careless stage movements!
To open / close the GIS valve, click on the
Flow
column /
Closed
/
Open
status. This will not be possible until the
Heat
column /
Warm
status has been reached.
Note
If any Property module
/
Gas Type is chosen, the opening
/
closing of
GIS valves is done automatically during patterning.
Some conditions must be fulfilled before insertion is enabled. The
user is notified by a tooltip.
When not in use, the GIS should be closed (to save lifetime), cold
and retracted. Leaving it closed, heated but retracted is also an option so that reheating is not necessary if it is to be
used over several patterns.
C a u t i o n !
Logging off an actual user does not change the conditions of the GIS’s.
It can be Warm, In and Opened even if the Microscope Control software is closed!
When the vacuum status is vented, GIS needles are retracted automatically. Despite that, retract it/them manually
before you start any activity inside the chamber (specimen exchange, detector mounting, etc.).
