6-1
C O N F I D E N T I A L
– limited rights
User Manual
Revision A
Feb 2018
6
Maintenance
This section describes necessary microscope maintenance procedures that can be carried out by the microscope
user. The user maintenance is at a minimum due to source and column design providing the long uptime. Therefore
a complicated maintenance is normally a part of a service contract to be performed by a qualified service engineer.
C a u t i o n !
Read and follow all instructions within the Apreo User safety manual carefully!
C a u t i o n !
- Parts that operate in vacuum should be handled carefully using clean powder-free gloves. Parts not in use should be
stored in suitable containers or packed in aluminum foil.
- The EDX window (option) is very fragile and must be protected from large pressure oscillations. Remove the detector
before major cleaning activities is also recommended.
- Be aware of removing the chamber door locking screws, used during instrument transportation (labeled REMOVE)! If
these are installed, an overpressure over 20 kPa (150 Torr, 0.2 bar) can arise inside the chamber during the vent
procedure (N
2
). If installed, the overpressure is harmful to the EDX window.
Note
Gas back fill (N2) should be maintained while the specimen chamber is at ambient pressure. However, to avoid gas waste
it is recommended that the chamber be left vented no longer than necessary.
Cleaning procedures overview
C a u t i o n !
Be aware of the electrical, thermal and mechanical hazards. Refer to the User safety manual for the details.
Frequency of cleaning is, in most cases, determined by necessity. The need for cleaning is shown by poor image
quality or gross astigmatism levels. Recommended cleaning procedures are given below for parts that operate in
vacuum and that are subject to possible contamination.
C a u t i o n !
In case the safety interlock does not function properly, the message appears onscreen warning about possible presence of
dangerous voltages inside the microscope chamber.
In this case do not touch parts inside the chamber and call service.
List of applied cleaners
•
De-ionized or distilled water – H
2
O
•
Ethanol – C
2
H
5
OH
•
Ethanol p/a (Pro Analysis: 99.8% pure) – C
2
H
5
OH
•
Isopropanol
•
Neutral pH cleaning fluid (soap solution)
•
CIF or Soft Scrub (fine abrasive household cleaner) or 0.05
µm
aluminous powder
Table 6-1
Household Cleaners
Country
Name
Country
Name
Austria
CIF
Italy
CIF
Australia
CIF
Japan
CIF
Finland
CIF
Netherlands
CIF