Operating Procedures: Stage Control
5-23
C O N F I D E N T I A L
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User Manual
Revision A
Feb 2018
Stage Control
Eucentric Position
Establishing the eucentric position is an important part of setting up a sample for observation or modification.
At the eucentric position, the stage tilt and the beam axes intersect. When the stage is tilted or rotated in any
direction, this point remains focused and almost does not shift. At the eucentric position, one can use various
system components in a safe and optimal way (e.g. GIS).
The eucentric position should be adjusted after loading any new sample, as the sample loading clears all position
information.
Note
For electron imaging of a non-tilted sample, the eucentric position adjustment is not necessary. But it is still necessary to
run the Link Z to FWD procedure.
FIGURE 5-10:
Eucentric Position Principle
4)
Tilting the stage does not move the point of interest
out of the beam.
1)
The point of interest is focused below the Eucentric
point.
Eucentric position
Tilt
Eucentric position
Z adjustment
Stage
Stage
2)
Tilting the stage moves the point of interest out of
the beam.
Stage
Beam
Beam
Beam
Point of interest
Point of interest
Eucentric position
and Point of interest
Feature is at
eucentric position.
Stage
Beam
3)
The point of interest is focused at the Eucentric
point.
