System Options: Patterning
7-19
C O N F I D E N T I A L
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User Manual
Revision A
Feb 2018
Patterns Processing
Once a pattern shape has been drawn, it can be modified (see Shape editing above).
Importing / Exporting patterns
User created patterns may be imported or exported (saved) via
the
File
menu /
Import
or
Export
/
Patterns
item. The saved file
(.ptf) contains all parameters found in the Patterning property
editor (Basic / Advanced) for all patterns drawn in the active
display. Six (for each beam) toolbar
Pattern Presets
(labeled p#)
can be individually assigned to any of these .ptf files.
Right-clicking on the selected button calls up the menu:
•
Apply
item – activates an appropriate button (highlighted with
an orange background) and starts the patterning with the preset
parameters (the same as clicking on the button directly)
•
Edit
item – opens the
Assign Pattern File
(.ptf) window to assign
a desired parameter file to a selected button
The toolbar Pattern Presets assignment to the particular .ptf file
can be saved or loaded by the
File
menu /
Export
or
Import
/
System Parameters
item.
Properties module
A certain pattern can be selected with many associated parameters
that can be set via the
Property
module:
•
Application
– clicking on the value slot produces a drop-down
arrow bringing a list of applications. Choosing the required one
sets the subsequent properties.
•
X / Y / Z size
– dimensions of the pattern
•
Scan Direction
–
•
Dwell Time
– a time the beam spends on a single pixel per pass
(rounded to a multiple of 25 ns).
•
Time
– required to process this pattern
•
Rotation
of the patterns (the positive direction is clockwise)
•
Position X / Y
of the pattern relative to the origin (the display
center)
•
Overlap X / Y –
sets the beam diameter overlap. The value of the
overlap can be positive or negative, depending on a particular
application. The overlap parameter influences the Area
Calculation and the Dose.
•
Gas Type
– the gas to be used to process the pattern (or None if
no gas is to be used). This determines the pattern color onscreen.
•
Pitch X / Y –
sets the pitch between two spots
•
Area Calculation –
defines how the patterning area will be
calculated in order to get the most accurate value for the
Dose
.
This value is related with the Overlap X/Y. The Pattern
(default) / Array are set for positive / negative overlaps.
•
Dose
–
•
Volume per Dose
– the volume of material that is removed per charge
•
Saturation Sputter Rate
– the maximum linear sputter rate for a given gas. For Gas = None, this is 0 (actually not
used).
•
Refresh Time
– the minimum loop time that must elapse before the next pass, so that the adsorbed gas can be
refreshed
