System Options: Patterning
7-22
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
Application Files
There are several application files delivered with the system that are intended for different uses. Each one incorporates
multiple parameters for particular patterning. Some of these application files use GIS’s. With multiple GIS’s
installed on your system, you can select a suitable application file for a given pattern. Processing specific materials
without gas can be done by using no application file, or more efficiently with the appropriate scanning conditions
using the dedicated Application file for that material. There are pre-defined (non-editable) and user-defined
(saved) files.
Note
A pattern must be defined before the Application file is selected. The pattern type automatically predetermines the set of
possible application files (therefore of gas type).
Within the application files compilation, there is the former Si application file with the Volume per Dose value determined
in the past, and the Si New application file with values corrected for use with silicon. Be aware of the different results from
using these application files!
Application Files Editing
A new application file can be created or an actual Application file can be edited in Windows Notepad
®
in case any
parameter of the process is insufficient. Application files (*.xml extension) are located in the
C:\Program Files\Fei\data\patterning application files
\ folder.
Note
If any Application file is to be changed, we recommend making a copy of the original one. Server restart is necessary after
placing a new Application file in the above mentioned folder for it to be functional.
Examples
For clear arrangement, there are comment lines within xml files:
•
comment line
filter
<!-- Application file for milling silicon (Si) without any gas -->
In order to make the application files selection more comprehensible, several filters have been implemented:
•
pattern type
filter
The system only shows application files that are related to a given pattern type.
<!-- Optional type, must be "Line, Circle, Rectangle, RCS, Bitmap, StreamFile, Polygon", can be a combination -->
<PatternType xmlns:dt="urn:schemas-microsoft-com:datatypes"dt:dt="string"> CCS</PatternType>
Multiple patterns can be designated in a list separated by comas. If the command is left blank, the file is shown
for all pattern types.
•
GIS type
filter
The system only shows application files depending on GIS’s installed on the system.
It is possible to edit / add / remove parameters (for instance Refresh Time - for filling vias, Blur - for depositing
large areas etc.) if required for certain applications.
•
Volume per Dose
variable
<VolumePerDose xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8">
0.15e
-9
</VolumePerDose>
The Volume per Dose is material dependent. Using any application file for milling different material substrates
results in a differnet
Z size
. The actual value can be measured and subsequently a new Volume per Dose value
can be defined / set.
