Software control: Microscope Control
3-15
C O N F I D E N T I A L
– limited rights
User Manual
Revision A
Feb 2018
Stage menu
opens the stage and sample navigation functions
(see Chapter 5):
Align Feature
opens the procedure that helps set a stage position for any
elongated feature (extending off the screen at the desired
magnification). The procedure uses the stage rotation.
Compucentric Rotation (F12)
places a green circle in the active display. By rotating the circle, a
different viewing orientation of the sample area can be achieved
by a physical stage rotation and adjustment of the X and Y axes.
Stage rotation keeps the observed feature in the center of the
field of view. If this does not occur, an alignment should be
performed to locate the stage center and calibrate the stage (see
Chapter 4).
Beam Shift Reset
zeroes the beam shift. A feature observed with a non-zero Beam
Shift is automatically moved back to the imaging center using the
stage.
Auto Beam Shift Zero
automatically resets the beam shift each time it reaches the
maximal value during the Get function (the point-to-point stage
movement) and corrects the imaging position with a stage
movement.
Home Stage (Shift + F3)
starts the procedure that moves all motorized axes to their
hardware limits and ensures that the physical stage position
agrees with the coordinates readout. During the home stage
procedure the
Stage Homing
dialog shows its progress. The stage
axes are moved to their end-switches in the following order:
1. Z
(lowest position);
2.
T
(tilt);
3.
X
,
Y
and
R
(rotation) at the
same time.
When the stage is homed correctly it ends up in the following
position:
The X
/
Y
position is set to the factory pre-set stage rotation
center;
R
= 0° /
T
= 0° /
Z
= preset long working distance.
Home Stage Without Rotation
executes the Home Stage function without rotation. When the stage is homed without rotation, the stage Rotation
reference is grayed out. This is useful when a large specimen is inserted and stage rotation can cause a collision
with equipment inside the chamber.
Center Position (Ctrl + 0 - digit)
moves the stage to coordinates X = 0, Y = 0.
External Current Measurement
Click on this item when you need to use an external measuring device (option). The
Status
bar /
Specimen Current
value shows
N/A
from that point on.
