Azbil Corporation
Maintenance and troubleshooting
Model MTG11A/18A, MTG11B/18B, MTG14C
8-15
Tantalum
2.5/5
80380614-00300
1
HS314203-05000
1
10
80380615-00300
1
HS314203-05000
1
15
80380616-00300
1
HS314203-05000
1
25
80380617-00300
1
HS314203-05000
1
40
80380618-00300
1
HS311230-06000
1
50
80380619-00300
1
HS311230-06000
1
65
80380620-00300
1
HS311230-06000
1
80
80380621-00300
1
HS311240-06000
1
100
80380622-00300
1
HS311240-06000
1
150
80380624-00300
1
HS311240-06000
1
200
80380625-00300
1
HS311240-06000
1
Platinum
2.5/5
80380614-00400
1
HS314203-05000
1
10
80380615-00400
1
HS314203-05000
1
15
80380616-00400
1
HS314203-05000
1
25
80380617-00400
1
HS314203-05000
1
40
80380618-00400
1
HS311230-06000
1
50
80380619-00400
1
HS311230-06000
1
65
80380620-00400
1
HS311230-06000
1
80
80380621-00400
1
HS311240-06000
1
100
80380622-00400
1
HS311240-06000
1
150
80380624-00400
1
HS311240-06000
1
200
80380625-00400
1
HS311240-06000
1
Gasket
Diameter
(mm)
Parts number
Qty.
PTFE
2.5/5
80380613-00100
1
10
80380613-00200
1
15
80380613-00300
1
25
80380613-00400
1
40
80380613-00500
1
50
80380613-00600
1
65
80380613-00700
1
80
80380613-00800
1
100
80380613-00900
1
150
80380613-01100
1
200
80380613-01200
1
Table 8-4 Wafer type grounding ring assembly
Grounding ring
material
Diameter
(mm)
Parts number
Qty.
Parts number
Qty.
CM2-MTG300-2001.book 15 ページ 2015年9月29日 火曜日 午前10時14分
Содержание MagneW Neo PLUS
Страница 16: ...List of Figures Tables CM2 MTG300 2001 book 4...
Страница 92: ...MEMO CM2 MTG300 2001 book 38...
Страница 106: ...MEMO CM2 MTG300 2001 book 4...
Страница 266: ...MEMO CM2 MTG300 2001 book 82...
Страница 312: ...MEMO CM2 MTG300 2001 book 46...
Страница 336: ...MEMO CM2 MTG300 2001 book 22...
Страница 338: ...CM2 MTG300 2001 book 2...