Adixen ASM 142, Руководство пользователя

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Safety questionnaire
Procedure for returning ADIXEN products
You wish to return an Adixen product for maintenance. The equipment will be dismantled and
possibly cleaned by a technician from our Service Centre.
In compliance with European Community’s L360 directives, French labor code L231 - R231 and
Federal OSHA Safety Standard 1910-1200, Alcatel Vacuum Technology requires this form to be
completed to preclude the potential health risk to its service personnel that can occur when
receiving, disassembling, or repairing potentially contaminated products.
Equipment returned without this form completed and secured to outside of package will
be returned to customer unprocessed.
Equipment must be drained of fluids and residue, securely packaged and shipped prepaid.
Concerning the closing of the ports (inlet & outlets of the product), metallic airtight blank flanges
should be used if toxic or copper gases have been pumped.
We wish to draw your attention to the following points:
• The risk may be of the following nature:
- Chemical:
Danger to health, risks of explosion, fire, risks for the environment. Please indicate
the chemical formula and name of the gases or substances that have been in contact with the
equipment (pump or detector).
- Biological:
In case of contamination (such as pathogenic germs, micro-organisms (bacteria,
viruses, etc.) classes 1 to 4 and group E), our Service Center is currently unable to decontaminate
and recycle such material without risk to the safety of our staff. Please contact us
before
sending
the product to the Service center.
- Radioactive:
In case of contamination, our Service Center is currently unable to decontaminate
and recycle such material without risk to the safety of our staff. Please contact us
before
sending
the product to the Service center.
- Copper contamination:
Copper based by products formed in sputtering or etching processes
are considered as a poison in some semi-conductor processes.
If following inspection and quotation, customer elects to not proceed with repair, he
will be subject to service fee to cover product decontamination, disassembly, cleaning
and evaluation costs.
Please to fill in the following form, print it and attach it to the product before shipping
to the service-repair office closest to you.
In the event of chemical contamination, please indicate the following
gases or substances:
Gases
introduced
Reactor
A
Substances produced
by reaction
C
B
Exhaust
A
B
C
Pump or pump unit
•
Gases (or substances) introduced into the reactor and which may be found at the exhaust (A).
•
Gases (or substances) resulting from the reaction or process (B).
•
Gases (or substances) that may possibly be formed inside the pump (due to a thermodynamic or
chemical reaction, condensation, deposition, precipitation, etc.) (C).
• Precautions need to be taken before transferring contaminated products.
Please contact Service Center for recommendations.
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