E 740
Greasing molecular and
turbomolecular pumps
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This technical sheet is for this differents pumps:
ATH 164
ATP 100
TMP 5154
MDP 5011
MDP 5006 HDS
AMP 007i
The frequency of preventive maintenance is listed
D 100
Components:
Grease syringe
F 600
Disassemble the pump
Accessing the bearings
It is necessary to disassemble the TMP 5154 and MDP 5006 HDS
from the detector to do the greasing.
It is not necessary to disassemble the MDP 5011 from the detector to
do the greasing.
MDP 5011 / 5006 HDS / AMP 007i
Remove the clips and use the extractor
to take out the plug.
Once the extractor is in place, pull it
vertically.
MDP 5011
TMP 5154 / ATP 100 / ATH 164
Remove the rear cap from the pump
(4 allen head screws).
This cap is directly accessible from
underneath the leak detector.
TMP 5154
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Содержание ASM 142
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