A 201
ASM 142 D detector operating principle
G
B
01476
-
E
d
it
io
n
03
-
J
un
e
08
Vacuum circuit
1
2
V
T3
3
V
A1
7
18
V
C
V
T2
8
V
S
4
V
T1
V
R1
5
V
R2
10
12
16
15
Bacosol valve
Minisol valves
Reference correspondence between valve/vacuum block marks
E 530
1
Preamplifier
V
A1
Inlet vent valve (6 points)
2
Analyzer cell
V
R1
Roughing valve (1 point)
3
Detector inlet port
V
R2
Roughing valve (2 points)
4
Internal calibrated leak
V
T1
Exhaust valve (3 points)
5
Inlet pressure gauge
V
T2
Detection valve (4 points)
7
Vent connector
V
T3
Detection valve (5 points)
8
Long distance sniffer connector
V
S
Sniffing valve (9 points)
10
Outlet pump connector
V
C
Calibration valve (7 points)
12
Purge filter
15
Roughing pump (AMD1)
16
Roughing molecular pump
(MDP 5006 HDS)
18
Detection molecular pump (AMP 007I)
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Содержание ASM 142
Страница 1: ...ASM 142 142 D ASM GRAPH GRAPH D GRAPH D HELIUM LEAK DETECTOR User s Manual ...
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Страница 315: ...G 201 Wiring diagrams ASM 142 D index 1 2 ...