A 800
ASM 142
Technical characteristics
G
B
00212
-
E
d
it
io
n
03
-
J
un
e
08
Measurement range
(Helium)
Crossover pressure
(at inlet)
mbar.l/s
Pa.m
3
/s
mbar
Pa
Gross leak test mode
1x10
-9
to 1
1x10
-10
to 0.1
10
1000
Normal test mode
1x10
-11
to 3x10
-4
1x10
-12
to 3x10
-5
5x10
-1
50
Sniffing test mode
1x10
-7
to 1x10
-1
1x10
-8
to 1
sniffer probe at atm. pressure
Response time (Inlet port blanked off)
< 0.5 s
Helium pumping speed at inlet port:
Gross leak test mode (at minimum inlet pressure)
1.1 l/s
Normal test mode (at minimum inlet pressure)
1.3 l/s
Roughing pump characteristics:
Roughing pump pumping speed (in air)
10 m
3
/h
Analyzer cell (Spectro):
Analyzer cell design
self protected 180° magnetic deflection mass spectrometer
Analyzer cell filament
2 separate tungsten filaments
Analyzer cell sensitivity
3x10
-4
A/mbar
Emission current range
0.2 to 2 mA
Displays adjustments:
Inlet port pressure display range
10
3
to 10
-3
mbar
10
5
to 10
-1
Pa
1/2
Содержание ASM 142
Страница 1: ...ASM 142 142 D ASM GRAPH GRAPH D GRAPH D HELIUM LEAK DETECTOR User s Manual ...
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Страница 315: ...G 201 Wiring diagrams ASM 142 D index 1 2 ...