
Rev. 1
Page 3-
9
CODE ALARM
DESCRIPTION
LCD INDICATION
RESET MODE
A 250
1st vacuum pulse not reached within
timeout
PV1 TIMEOUT
A 251
1st rise to ambient pressure not reached
within timeout
ATM1 TIMEOUT
A 252
1st pressure pulse not reached within
timeout
PP1 TIMEOUT
A 253
2nd vacuum pulse not reached within
timeout
PV2 TIMEOUT
A 254
2nd rise to ambient pressure not reached
within timeout
ATM2 TIMEOUT
A 255
2nd pressure pulse not reached within
timeout
PP2 TIMEOUT
A 256
3rd vacuum pulse not reached within
timeout
PV3 TIMEOUT
A 257
3rd rise to ambient pressure not reached
within timeout
ATM3 TIMEOUT
A 258
3rd pressure pulse not reached within
timeout
PPP TIMEOUT
A 259
Phase of PROCESS not started within
timeout
PROCESS TIMEOUT
A 260
Chamber depressurization not completed
within timeout
TIMEOUT PPD
Press key
(> 3 seconds)
Содержание millennium B
Страница 1: ...Rev 1...
Страница 202: ...Rev 1 Gr2 INDEX GROUP 2 ELECTROVALVES EV1 VALVE 1 EV2 VALVE 2 EV3 VALVE 3 EV4 VALVE 4 EV5 VALVE 5...
Страница 208: ...Rev 1 Gr3 INDEX GROUP 3 PUMPS STEAM GENERATOR WATER PUMP 1 AUTOMATIC WATER FILLING PUMP 2 VACUUM DOUBLE PUMP 3...
Страница 243: ...Rev 1 Gr7 INDEX GROUP 7 COVERS FRAME COVER 1 DOOR COVER 2 FRONT FRAME 3 SERVICE DOOR 4...
Страница 270: ...Rev 1 Page 4 4 HYDRAULIC DIAGRAM CHAMBER HEAT EXCHANGER WP VP Main tank...
Страница 271: ...Rev 1 Page 4 5 EXPLODED VIEWS TABLE 1...
Страница 272: ...Rev 1 Page 4 6 TABLE 2...
Страница 273: ...Rev 1 Page 4 7 TABLE 3...
Страница 274: ...Rev 1 Page 4 8 TABLE 4...
Страница 275: ...Rev 1 Page 4 9 TABLE 5...
Страница 276: ...Rev 1 Page 4 10 TABLE 6...