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Setting Up the Keysight 5500 SPM
5
Keysight 5500 SPM User’s Guide
5-5
Utilities
The following table summarizes the utility requirements for the
Keysight 5500 SPM.
Noise and Facility Specifications
Acoustic Noise
The semiconductor manufacturing industry has developed a
standardized set of one-third octave band velocity spectra, called
vibration criterion curves (
), to define acceptable
environmental noise. For operation of the Keysight 5500 SPM, facility
acoustic noise should be less than 75 dBc. In order to achieve the
Table 2
Keysight 5500 SPM utility requirements
Configuration
Keysight 5500 SPM
Electrical
1600 W; single phase; 100-120 V or
220-240 VAC; 5 A; 50-60 Hz
Surge protection
Strongly recommended; minimum 7 outlets
Air for isolation chamber
Not required
Internet connection
Recommended
Содержание 5500
Страница 1: ...Keysight 5500 Scanning Probe Microscope User s Guide ...
Страница 2: ......
Страница 9: ...Read This First N9410 90001 Keysight 5500 SPM User s Guide ix Declaration of Conformity ...
Страница 174: ...Additional Imaging Modes 5 Keysight 5500 SPM User s Guide 5 40 Figure 7 23 Plug in Images window ...
Страница 215: ...Closed Loop Scanners 5 Keysight 5500 SPM User s Guide 5 17 Save the calibration file X Y Z calibration is now complete ...
Страница 274: ...Temperature Control 5 Keysight 5500 SPM User s Guide 5 8 Figure 13 10 7500 9500 hot sample plate wiring diagram ...
Страница 275: ...Temperature Control 5 Keysight 5500 SPM User s Guide 5 9 Figure 13 11 5500 hot MAC sample plate wiring diagram ...
Страница 276: ...Temperature Control 5 Keysight 5500 SPM User s Guide 5 10 Figure 13 12 7500 9500 hot MAC sample plate wiring diagram ...
Страница 284: ...Temperature Control 5 Keysight 5500 SPM User s Guide 5 18 Figure 13 21 5500 Peltier Cold sample plate wiring diagram ...
Страница 297: ...Thermal K 5 Keysight 5500 SPM User s Guide 5 9 Figure 14 8 Select units after calibrating the Force Constant ...
Страница 330: ...Keysight Technologies 5500 SPM User s Guide Part Number N9410 90001 Revision H Keysight Technologies 2015 ...