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Vacuum System
6
Troubleshooting and Maintenance Manual
131
Vacuum System Components
The parts of the vacuum system are:
•
Foreline (rough) pump
•
High-vacuum turbo pump
•
Front and rear analyzer chambers
•
Collision cell cover
•
Side plates (analyzer doors), and front and rear end plates
•
Vacuum seals
•
Calibration valve and vent valve
•
Vacuum control electronics
•
Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 19
Major vacuum system components
To foreline pump
Turbo pump
Turbo pump
Analyzer chamber
GC/MS interface
Ion vacuum gauges
cooling fan
Summary of Contents for 7000 Triple Quadrupole GC/MS
Page 24: ...24 Troubleshooting and Maintenance Manual 1 Introduction...
Page 50: ...50 Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 122: ...122 Troubleshooting and Maintenance Manual 4 General Maintenance...
Page 144: ...144 Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 182: ...182 Troubleshooting and Maintenance Manual 8 Electronics...
Page 213: ......
Page 214: ...Agilent Technologies Agilent Technologies Inc Printed in USA September 2009...