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3.3 Trouble Shooting
3.3.7
Processing Solution Tank Level Lowering
Remove circulation filter from sub-tank,
and measure solution level from
upper surface of sub-tank.
Leakage in processing solution system?
Repair leakage.
Prepare processing solution.
Lowering
Leakage
Normal
Normal
less than 65mm: Normal
more than 65mm: Lowering
To “Processing solution level sensor diagnostics”
To “3.3.8 Replenishment Pump Diagnostics”
To “3.3.8 Replenishment Pump Diagnostics”
Remove processing solution level sensor,
soak it into water container.
Sensor turned ON/OFF on
“Processor Input Check (0624)”?
Are any of the following harnesses
between the solution level sensors and
the JNE23 circuit board are poorly
connected or broken?
Connect harness correctly,
repair or replace it.
Replace the JNE23 circuit board.
Abnormal
Yes
Normal
No
<Processing solution level sensor diagnostics>
P1:
FS700 to JNE5
P2:
FS701 to JNE5
PS1: FS702 to JNE5
PS2: FS703 to JNE5
PS3: FS704 to JNE5
PS4: FS705 to JNE5