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3.3 Trouble Shooting
3
Compare display values with measured
values on “Processor Temperature
Calibration (0623)”.
Is the harness between the solution
thermometer and the CTL23 circuit board is
poorly connected or broken?
Replace processing solution
temperature sensor.
Solved?
Connect harness correctly,
repair or replace it.
Replace the CTL23 circuit board.
Abnormal
Yes
Solved
Normal
No
Not solved
To “Processing solution circulation”,
“Safety thermostat”,
“Heater cooling fan”
END
P1:
TS700 to CTL7
P2:
TS701 to CTL7
PS1/2/3: TS702 to CTL7
PS4:
TS703 to CTL7
<Temperature sensor>