5-80
5.5 Carrier Adjustment/Maintenance (04)
This procedure sets up offset value of focus position
for each carrier and mask.
[Selection]
[Setup and Maintenance]
→
[04 Carrier Adjustment/
Maintenance]
→
[0442 MFC10AY Focus Offset
Adjustment]
1. Select the carrier ID to be set up.
2. Change the offset value of the mask to be set up.
NOTE: Enter “0.00”mm normally.
3. Click the [Storage] button.
4. Click the [OK] button.
5. Click the [Close] button.
• Operation returns to the menu screen.
5.5.11
MFC10AY Focus Offset Adjustment (0442)
