5.2.3
Performance
CELL A
(Option)
WL Accuracy Hg (253.7 nm)
WL Accuracy Hg (435.8 nm)
WL Accuracy Hg (546.1 nm)
WL Repeatability Hg
Resolution Hg (546.1 nm)
4.75 nm OK
Hardware
Print Report
Select function. : _
□
1 Print
Fig. 5-41 Screen after Resolution Check with
Hg Lamp (546.1 nm)
(4) For printing the measurement result, press the <1> key
(Print). The performance check item selecting screen
returns when you press the [RETURN] key.
Table 5-11 Measuring Conditions and Judgment Standard
for Resolution with Hg Lamp (546.1 nm)
Item
Resolution with Hg Lamp (546.1 nm)
Measuring
conditions
Emission spectrum of Hg lamp bright line (with
detector on the monitor side)
Wavelength range : 540.1 to 552.1 nm
Scan speed
: 40 nm/min
Data interval
: High resolution
Response :
Standard
Spectrum to be measured.
Calculation method
For the peak value (A) in the determined
spectrum, peak width B (half-value width) at a
height of (A + h)/2 is obtained. The B value is
taken as a resolution.
Energy
A
h
(A-h)/2
0
Wavelength
Half-value width (B)
Judgment standard
Within 5
±
0.50 nm
5 - 31
Содержание U-5100
Страница 280: ...5 1 Check with Instrument Main Unit Alone Fig 5 6 Example Result of Wavelength Accuracy Check at 484 6 nm 5 6 ...
Страница 283: ...5 1 2 Fig 5 10 Example Result of Wavelength Repeatability Check 5 9 ...
Страница 286: ...5 1 Check with Instrument Main Unit Alone Fig 5 14 Example Result of Noise Level Check 5 12 ...
Страница 289: ...5 1 4 Fig 5 18 Example Result of Baseline Flatness Check 5 15 ...
Страница 292: ...5 1 Check with Instrument Main Unit Alone Fig 5 22 Example Result of Baseline Stability Check 5 18 ...
