5.2.2
Performance
CELL A
(Option)
WL Accuracy Hg (253.7 nm)
WL Accuracy Hg (435.8 nm)
WL Accuracy Hg (546.1 nm)
WL Repeatability Hg
±
0.05 nm OK
Resolution Hg (546.1 nm)
Hardware
Print Report
Select function. : _
□
1 Print
Fig. 5-38 Screen after Wavelength Repeatability Check
(4) For printing the measurement result, press the <1> key
(Print). The performance check item selecting screen
returns when you press the [RETURN] key.
Table 5-10
Measuring Conditions and Judgment Standard
for Wavelength Repeatability with Hg Lamp
Item
Wavelength Repeatability with Hg Lamp
Measuring conditions
Emission spectrum of Hg lamp bright line
(with detector on the monitor side)
Wavelength range : 540.1 to 552.1 nm
Scan speed
: 40 nm/min
Data interval
: High resolution
Response :
Standard
Spectrum to be measured 3 times.
2nd measurement after shifting to 1100 nm.
3rd measurement after shifting to 190 nm.
Calculation method
A difference between maximum and minimum
peak wavelength values in 3 measurements
is determined. Then, wavelength
repeatability is calculated according to the
following formula.
Wavelength repeatability =
±
(difference between maximum and minimum
peak wavelength values)/2
Judgment standard
Within
±
0.5 nm
5 - 29
Содержание U-5100
Страница 280: ...5 1 Check with Instrument Main Unit Alone Fig 5 6 Example Result of Wavelength Accuracy Check at 484 6 nm 5 6 ...
Страница 283: ...5 1 2 Fig 5 10 Example Result of Wavelength Repeatability Check 5 9 ...
Страница 286: ...5 1 Check with Instrument Main Unit Alone Fig 5 14 Example Result of Noise Level Check 5 12 ...
Страница 289: ...5 1 4 Fig 5 18 Example Result of Baseline Flatness Check 5 15 ...
Страница 292: ...5 1 Check with Instrument Main Unit Alone Fig 5 22 Example Result of Baseline Stability Check 5 18 ...
