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Table of Contents

7 Troubleshooting .............................................................................114

Chamber.............................................................................................................115
7.1.1

Initializing the Stage.............................................................................. 115

7.1.2

Defining the Post Initialization Position of the Stage.............................. 116

7.1.3

Changing the Joystick TV Angle ............................................................ 116

7.1.4

Resetting the Touch Alarm .................................................................... 117

7.1.5

Checking the Temperature .................................................................... 117

7.1.6

Replacing the Chamber Door Seal ......................................................... 117

7.1.7

Adjusting the Isolation Mounts ............................................................. 119

7.2

Column ...............................................................................................................120
7.2.1

Baking out the Gun Head...................................................................... 120

7.2.2

Replacing Filaments .............................................................................. 121

7.3

Power Circuit ......................................................................................................147
7.3.1

Checking the Position of the Circuit Breakers ........................................ 147

7.4

PC.......................................................................................................................147
7.4.1

Cleaning up the PC ............................................................................... 147

8 Decommissioning and Disposal.......................................................148

8.1

Decommissioning................................................................................................148

8.2

Transport and Storage ........................................................................................149

8.3

Disposal ..............................................................................................................151

8.4

Decontamination ................................................................................................151

9 Technical Data and Conformity.......................................................152

9.1

Layout and Connections......................................................................................152

9.2

System Layout.....................................................................................................153

9.3

Performance Data and Specifications | EVO 10 ....................................................153

9.4

Performance Data and Specifications | EVO 15 ....................................................159

9.5

Performance Data and Specifications | EVO 25 ....................................................164

9.6

Applicable Standards and Regulations.................................................................169

10 Parts and Tools ...............................................................................171

10.1

Consumables ......................................................................................................171

10.2

Spare Parts..........................................................................................................171

10.3

Tools and Accessories .........................................................................................171

Glossary ..........................................................................................173

Index...............................................................................................176

Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

Содержание EVO

Страница 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...

Страница 2: ...iving purposes shall remain unaffected thereby Any viola tions may be prosecuted as copyright infringements The use of general descriptive names registered names trademarks etc in this document does n...

Страница 3: ...ety Devices and Interlocks 18 2 5 1 Protective Cover Panels 18 2 5 2 Main Disconnect Device 19 2 5 3 Circuit Breaker 19 2 5 4 Locking Devices 20 3 Product and Functional Description 21 3 1 Vacuum Syst...

Страница 4: ...e Current 81 5 5 4 Measuring the Probe Current 81 5 5 5 Selecting the Optibeam Operation Mode 81 5 6 Finding Appropriate Detector Settings 82 5 6 1 Selecting a Detector 82 5 6 2 Setting up the SE Dete...

Страница 5: ...Position of the Circuit Breakers 147 7 4 PC 147 7 4 1 Cleaning up the PC 147 8 Decommissioning and Disposal 148 8 1 Decommissioning 148 8 2 Transport and Storage 149 8 3 Disposal 151 8 4 Decontaminat...

Страница 6: ...Conventions and Link Types The following text conventions and link types are used Text convention Meaning Click Start Press the STANDBY button Press Enter on the keyboard The names of controls and imp...

Страница 7: ...essages indicating dangerous situations and hazards are used in this doc ument DANGER Type and source of danger DANGER indicates an imminently hazardous situation which if not avoided will result in d...

Страница 8: ...ase refer to its Online Help or ask your ZEISS Sales Service Partner System and 3rd Party Components Accessories Information about the individual components enhancements and accessories can be obtaine...

Страница 9: ...stallations SmartSEM Software The SmartSEM software is intended for the operation of scanning electron microscopes SEMs The SmartSEM software has to be run exclusively on a personal computer delivered...

Страница 10: ...e shall void all rights to warranty claims The regional regulations on health protection and accident preven tion must be observed at all times and during all work on and with the Microscope System Tr...

Страница 11: ...long working distance before opening the chamber door Isolation Mounts The isolation mounts are specified only up to 4 5 bar If you pump up the isolation mounts above 4 5 bar then the isolation mounts...

Страница 12: ...diately and inform the facility s safety officer Concerning the hazards of nitrogen installations and associated safety precautions refer to the current version of the guideline IGC Doc 44 18 Hazards...

Страница 13: ...vice which indicates that X rays are generated inside the micro scope Subsequent changes to the device by the user usually result in a new assessment of the de vice s classification with regard to the...

Страница 14: ...the microscope warn operators of hazards Each safety label is af fixed close to the point where a particular hazard exists Several labels also provide legal informa tion Front Side of Microscope 1 4...

Страница 15: ...needs to be reordered via the following reorder numbers Position and Figure of the Safety La bel Description 1 At the front of the chamber door CAUTION Risk of injury 347800 0033 000 02en Fingers cou...

Страница 16: ...injury CAUTION 347800 0033 000 01en Make sure you have read and understood the instruction manual before operating this product Avoid injury Make sure you have read and understood the in struction man...

Страница 17: ...vice Staff is allowed to service the equipment Disconnect power before opening Hazardous voltage inside WARNING 347800 0033 000 03en Hazardous voltage inside Contact may cause burn or electric shock O...

Страница 18: ...uring year and the mains voltage for which the EVO is configured either 230 VAC or 120 VAC Order no 354900 9040 000 EVO10 Order no 354900 9041 000 EVO15 Order no 354900 9042 000 EVO25 2 5 Safety Devic...

Страница 19: ...Fig 2 CEE connector If the Emergency Off EMO Option is installed the Main Switch of the EMO Option may be used as Main Disconnect Device for the microscope and its components refer to Emergency Off EM...

Страница 20: ...introduced at the end of 2010 and is not optionally available for older EVO models Fig 4 Column interlock device 2 5 4 2 Vacuum Locking Device The vacuum locking device ensures that gun vacuum and sys...

Страница 21: ...le pressure applications Refer to VPSE Detector 39 C2D Detector 42 and C2DX de tector BSD detectors for high efficiency and angle selective material charac terization Refer to BSD Detector HDBSD BSD1...

Страница 22: ...rate the gun and to prevent collisions of electrons with gas molecules 1 2 4 5 6 3 8 7 Fig 6 Schematics of the vacuum system high vacuum pre vacuum 1 Penning gauge 2 Turbo isolation valve TIV EVO with...

Страница 23: ...m or 30 m mid column aper tures are used for the beam profile control No pressure limiting aperture is mounted under the objective lens HV mode provides the means to obtain higher resolution and enabl...

Страница 24: ...ture 1000 m beamsleeve 750 m W LaB 10 1000 If your microscope is a VP type instrument with the through the lens pumping option then the maximum pressure in VP mode can be increased to 400 Pa Tab 3 Com...

Страница 25: ...used for imaging It is possible to switch between HV mode and EasyVP mode and the beam alignment is optimum in both conditions without adjusting any gun or column parame ters In this EasyVP mode confi...

Страница 26: ...ressure mode high vacuum extended pressure 1 Pre vacuum pump directly pumping the chamber 2 Gun at high vacuum 3 Chamber at extended pressure 4 Two pressure limiting apertures mounted under the object...

Страница 27: ...ament serves as gun 1 The filament is heated by applying the filament current The heated filament emits electrons EHT The acceleration voltage UEHT accelerates the emitted electrons Gun Alignment and...

Страница 28: ...The stigmator coils 5 compensate for astigmatism so that the electron beam becomes rota tionally symmetrical Deflection System The electron beam is focused by the objective lens 6 onto the specimen 8...

Страница 29: ...chosen probe current at any working dis tance or accel eration voltage Largest field of view for naviga tion and a very large depth of field Tab 4 Optibeam modes and their beam paths 3 3 Detectors Th...

Страница 30: ...Specific types of detectors are able to detect the SEs and BSEs The detector signals can be used to create images and produce information about the properties of the specimen 1 2 3 Fig 12 Interaction...

Страница 31: ...by elastic scattering in a much deeper range of the interaction volume up to 1 m and carry depth information The backscatter coefficient increases with increasing atomic number of the elements within...

Страница 32: ...C2DX Detector on VP systems only Measures the current that re sults from the ionization of gas by SEs Extended pressure Imaging of biological speci mens in a fully hydrated form BSD Detector HDBSD BS...

Страница 33: ...lier multiplies the flashes of light and outputs a signal that can be used for imaging The collector voltage can be varied in the range between 250 V and 400 V A positive collector voltage generates a...

Страница 34: ...f surface information at different acceleration voltages Acceleration voltage 1 kV Good sur face sensitive imaging left Acceleration voltage 10 kV Thin layers are not seen right Fig 18 Comparison of s...

Страница 35: ...tector always include some backscattered electron com ponents most of the signal is generated by the secondary electrons and the fraction of backscat tered signal is negligible The images obtained by...

Страница 36: ...e in which both the backscattered and secondary electrons are emitted from the speci men Parameter Description Acceleration voltage 0 02 kV to 30 kV In principle suitable for the entire high voltage r...

Страница 37: ...OTICE Risk of collision Use the chamber CCD camera to monitor the position of the specimen holder during stage movements Pay particular attention to the distance between the objective lens and the top...

Страница 38: ...n The specimen stage is mounted on the chamber door If the chamber door is closed the speci men stage is inside of the specimen chamber 2 1 1 2 Fig 24 Specimen stage with dovetail fitting for precise...

Страница 39: ...ic type of SE detector for use in Variable Pressure mode where a standard SE detector cannot be used The VPSE detector is not usable and will not operate in HV mode The Variable Pressure mode enables...

Страница 40: ...parameters It is usu ally in the range between 20 Pa and 60 Pa Info If the chamber pressure rises then the scattering of electrons is increased and the resolution of the microscope is reduced Try to...

Страница 41: ...parameters for imaging different specimens It is generally better to reduce the collector bias because reducing the chamber pressure can cause new charging effects Fig 28 Charge compensation by adjus...

Страница 42: ...high potential at the scin tillator would cause an electrical breakdown with a lightning flash that runs from the scintillator to the outer body Fig 29 C2D image of radiolaria Function On the surface...

Страница 43: ...ifferent contrast with different segment configuration of the BSD detector material contrast left and topography right NOTICE Motorized specimen stage Risk of damaging the detector when operating the...

Страница 44: ...electrons from a specimen is related to the atomic number of the involved material Elements with high atomic numbers generate more backscattered electrons i e the backscatter coefficient is higher Wh...

Страница 45: ...an ultrathin specimen The STEM unit consists of a pre aligned specimen holder and a Bright field STEM detector which is a diode detector for electrons Position The pre aligned holder fits directly on...

Страница 46: ...inclined detector that allows efficient visible or ultra violet light collection The CL detector is ideal for use in geology mineralogy and materials sci ence applications where it can help in intern...

Страница 47: ...the stage rotation by turning Function All axes are deflection compensated When the joystick is moved only slightly the respective axis moves slowly Larger movements of the joystick result in a faste...

Страница 48: ...es the beam roundness by changing the stigmation deflectors 2 Aperture X Aperture Y Adjusts the mid column shift and tilt deflectors for aligning the beam along the column axis 3 Scan Rotate Rotates t...

Страница 49: ...be observed 8 Freeze Stops the scan and grabs one complete frame at the current imaging conditions 9 Exchange Resume Exchange Starts the pre defined macro for specimen exchange with the airlock Resum...

Страница 50: ...3 2 4 5 6 9 7 11 12 8 10 Fig 38 Screen layout of the user interface 1 Title Bar Displays the name of the user interface and the logged on user 2 Menu Bar Enables you to access SmartSEM features via s...

Страница 51: ...access 12 Mini Bar Provides quick access to recently used dialogs and to the recipe management 3 6 2 Graphical Control Elements The following graphical control elements are used in the SmartSEM GUI S...

Страница 52: ...accessible User profiles are defined by the administrator Access Menu Bar Tools Administrator User Access Level Description Novice Only the items assigned to the novice category are accessible These i...

Страница 53: ...Program Description LaB6_Setup Contains information about the LaB filament ReadMe Contains important information on the currently installed version Release Notes Contains an overview of all SmartSEM v...

Страница 54: ...service representatives only Multi GIS Service Not relevant for this type of microscope Pivot Point Call Not relevant for this type of microscope Service Centre Provides an overview of the state of th...

Страница 55: ...lation requirements are to be observed and adhered to After installation or retrofitting thor oughly check that the Microscope System is in a safe operational state making sure in particular that all...

Страница 56: ...fully understood by each person who is in the same room as the microscope at any time WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during...

Страница 57: ...r as long as the Main Switch of the EMO Circuit is in the ON position To completely cut off the microscope from any mains power 4 with installed EMO Circuit set the Main Switch to the OFF position 4 w...

Страница 58: ...clockwise to the Reset position and then back via OFF to the ON position 6 Press the green Start button 5 2 2 Starting the Microscope Info If the system was powered off for a longer time period the io...

Страница 59: ...er nal communication between software and hardware of the microscope The EM Server Log On dialog is displayed 3 Enter the user name and password 4 Click OK The SmartSEM user interface opens and is rea...

Страница 60: ...E Resets Beam Shift to zero SCROLL LOCK Toggles Freeze Unfreeze PAUSE Causes currently executing macro to continue Performs Find Image function CTRL 2 Loads Second Image Window from display CTRL A Swi...

Страница 61: ...ty infringements and in worst case workflow interruptions This section describes basic procedures to obtain an image using the SE detector To simplify the procedure the description uses the SEM Contro...

Страница 62: ...an be obtained from the supplier of the chemicals NOTICE Environmental risk due to disposal of aggressive or toxic chemicals When disposing of aggressive or toxic chemicals there is a threat of damage...

Страница 63: ...From the Menu Bar select Tools Goto panel The Panel Configuration Bar is displayed It contains an alphabetical list of functions 2 Double right click SEM Controls The SEM Controls panel is added to t...

Страница 64: ...o lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During specimen exchange keep the chamber door open a...

Страница 65: ...contact may cause electrical shock 4 Always switch off the beam deceleration before you open the chamber door CAUTION Moving the specimen stage Fingers can be trapped by the moving specimen stage 4 A...

Страница 66: ...he flat side of the dovetail of the specimen holder is flush with the milled edge of the specimen stage 5 Check the chamber view to ensure the specimen does not hit any components when it is introduce...

Страница 67: ...s dialog is displayed 3 In the Stage Navigation Settings dialog click Show Holder Gallery The Sample Holder Gallery dialog is displayed 4 In the Sample Holder Gallery dialog select the installed speci...

Страница 68: ...en you switch on the EHT the gun starts emitting electrons Info If you operate the microscope with a LaB filament then you need to switch on or switch off the gun and the EHT separately Prerequisite T...

Страница 69: ...be gener ally reduced in this mode due to the use of relatively high acceleration voltages beam and fil ament currents up to 30 kV 40 A and 2 050 A Long Fil Life mode for longer filament lifetime Long...

Страница 70: ...Beam Current value to 40 A Set the Filament I target to 2 050 A Switch to the long filament life mode by ticking the Long Fil Life box on the Gun tab Turn the Beam On Go to the Apertures tab and click...

Страница 71: ...n on the sides of the central spot This is the emission image for best performance providing optimal resolu tion 16 Adjust the Gun Shift and Gun Tilt Center the emission image obtain a symmetrical sha...

Страница 72: ...1 In the SEM Controls panel select the Vacuum tab 2 Check that Vac Status Ready is displayed 3 In the SEM Controls panel select the Gun tab 4 Double click the Fil I Target readout The Fil I Target win...

Страница 73: ...ns to help you with these tasks This procedure consists of the following steps 1 Selecting the Optibeam Mode and the Apertures 73 2 Setting EHT and Probe Current 74 3 Selecting the SE Detector 74 4 Se...

Страница 74: ...tab 2 Double click the I Probe readout and enter 100 The probe current is set to 100 pA 3 Double click the EHT Target readout and enter 20 The EHT is set to 20 00 kV 5 4 9 3 Selecting the SE Detector...

Страница 75: ...en stage to a suitable location for imaging use the X and Y controls on the joystick 2 In the Toolbar select the MAGWD icon The Status Bar displays the values for magnification and focus 3 In the Stat...

Страница 76: ...ng procedure describes how to manually improve the image quality You can also use the Auto Aperture Alignment Function Info The following procedure describes the best way to quickly optimize the image...

Страница 77: ...outside the scan frame is frozen 2 To change the position of the scan frame click on the green border line and use the mouse to drag and drop the frame 3 To change the size of the scan frame click on...

Страница 78: ...eed to change the position of the X and Y micrometer gauges on the mid column aperture changer INFO If you change the EHT or the I Probe later during imaging align the beam via Auto Aperture Align in...

Страница 79: ...the Tool bar INFO This runs a macro that automatically changes the scan speed to 8 the noise reduc tion to line integration with 4 lines and freezes the image at the end of the frame A red dot at the...

Страница 80: ...perture Alignment Function Auto aperture align is used to improve the quality of the images When the aperture align is se lected the software automatically aligns the beam with respect to the EasyVP a...

Страница 81: ...e EHT 5 Set a magnification that allows transmission of the complete electron beam through the aperture into the cavity of the Faraday cup 6 From the Panel Configuration Bar select Specimen Current Mo...

Страница 82: ...not be available The fixed apertures are apertures which are screwed into the column of the microscope and which you need to distin guish from the click stop apertures Prerequisite Fisheye mode requir...

Страница 83: ...3 Setting up the C2DX Detector 84 Setting up the BSD Detector 85 Setting up the YAG BSD Detector 87 Procedure 1 Select the Detectors tab of the SEM Controls panel 2 Select the detector from the Signal...

Страница 84: ...the image is readjusted to a centered his togram at a brightness value of 50 7 Adjust the contrast of the image 8 If you are unable to reach saturation or if the image quality is not good increase C2...

Страница 85: ...l is displayed 4 Select C2DX Gain Low 5 Adjust the C2DX Bias scroll bar until you obtain a good and stable image INFO A typical value for C2DX Bias is 50 Contrast and brightness should also be ad just...

Страница 86: ...Control The BSD Control panel enables you to change the polarity of the segments select BSD modes and set the BSD gain The BSD Control panel is displayed 8 Click a segment symbol to toggle its status...

Страница 87: ...off when a diode detector is used 5 6 6 Setting up the YAG BSD Detector NOTICE Inserting the YAG BSD detector When you manually insert the detector there is a risk to damage the YAG BSD detector 4 Use...

Страница 88: ...the specimen Fig 41 Beam deceleration kit left and 9 stub beam deceleration specimen holder middle and right CAUTION Risk of electrical shock by stage on bias voltage If you open the chamber door whi...

Страница 89: ...7 2 Setting up the Stage Bias Low Voltage Stage biasing can also be used for applying low voltages in the range of 20 V to 20 V to speci mens This low voltage specimen biasing is normally used in com...

Страница 90: ...e Navigation Bar via Stage Navigation The Stage Navigation Settings dialog is displayed 2 Activate the Safe Navigation checkbox 3 In the Stage Navigation Settings dialog click Sample Holder Gallery Th...

Страница 91: ...ood mechanical stability Health and safety procedures regarding the handling of the specimen during its preparation need to be observed There should be good electrical connection between the surface o...

Страница 92: ...Function The sample type selection function enables the user to obtain an image of any specimen quickly i e a reference image without putting any effort in selecting the operating parameters vacuum mo...

Страница 93: ...conductive specimen the VP mode needs to be used For EasyVP mode the 400 m EasyVP aperture is fitted under the objective lens and the 20 m mid column aperture is used Refer to Installing and Deinstall...

Страница 94: ...720 1464 000 Alternatively 100 m VP aperture 350700 0700 000 Aperture removal tool 350700 0692 000 VP aperture tool 350700 0859 000 Prerequisite The microscope is equipped with the VP mode or EasyVP m...

Страница 95: ...9 Click Select Aperture and select the appropri ate aperture 10 To evacuate the specimen chamber click Pump in the Vacuum tab 11 Turn the knob of the mid column aperture changer to select the appropr...

Страница 96: ...e the position of the X and Y micrometer gauges on the mid column aperture changer Prerequisite The EasyVP aperture is fitted The 20 m aperture is selected at the mid column aperture changer position...

Страница 97: ...itude and activate the Wobble Fast checkbox 20 Carefully adjust the X and Y micrometers gauges of the mid column aperture changer to align the mid column aperture and eliminate any lateral image shift...

Страница 98: ...a to retain water at ambient tempera ture 20 C to 30 C Temperature Temperature of the speci men to retain water at 650 Pa 1 C controlled by the Peltier coolstage 5 7 3 1 Installing or Deinstalling the...

Страница 99: ...mm maximum field of view Fig 43 100 m EP aperture and 500 m beamsleave aperture Prerequisite The microscope is equipped with the EP mode option Procedure 1 In the SEM Controls panel select the Vacuum...

Страница 100: ...ew in until the O ring is completely inserted cannot be seen and the beamsleeve aperture hits a hard stop Do not over tighten The O ring will give some resistance which is normal 8 In the SEM Controls...

Страница 101: ...ools Hex key 1 5 mm 000000 0151 883 Hex Key 2 5 mm Hex Key 3 0 mm Stub tool Procedure 1 Use a hex key 3 mm to remove the round right hand blanking plate from the chamber door 2 To detach the Peltier c...

Страница 102: ...nd carefully rest it with its pipe work on the stage 4 Attach the Peltier head to the stage via the dovetail fitting used for all other specimen holder types 5 To ensure the Peltier cable is not too b...

Страница 103: ...Specific Specimen Types 6 Use a hex key 2 5 mm to attach the Peltier coolstage holder to the microscope stage 7 Use a hex key 3 mm to fix the Peltier vacuum flange to the chamber door Instruction Man...

Страница 104: ...tilted to ensure good contact to the cooling area INFO For wet imaging of hydrated specimens it is essential to maintain a constant cooling temperature on the stub 9 Use a hex key 1 5 mm to carefully...

Страница 105: ...it until Vac Status Ready and EHT Vac ready Yes are displayed This can take some time 4 From the Menu Bar select Stage Navigation The Stage Navigation panel is displayed 5 Click Settings The Stage Nav...

Страница 106: ...d for a while set Purge cycles to 10 6 If the system has recently been used in the wet mode set Purge cycles to 3 7 Set Purge Max to 1000 Pa 8 Set Purge Min to 100 Pa 9 Click EP Gas Air to toggle the...

Страница 107: ...a new stub place and tighten the stub on the Peltier cool stage 10 Use a pipette for putting a few droplets of distilled water on the Peltier coolstage holder INFO Do not put any water droplets on the...

Страница 108: ...y If optimum performance is required the Long Fil Life checkbox should be deactivated Prerequisite The microscope is in ON mode Procedure 1 Click the All button in the status bar 2 Select EHT Off from...

Страница 109: ...FF mode The electron column is partially vented Computer electronic components and vacuum system are switched off A 24 V auxiliary voltage is still present to restart the microscope 5 8 3 Closing the...

Страница 110: ...o Finishing the Work Session LaB Filament 108 or Finishing the Work Session Tungsten Filament 108 Procedure 1 If the microscope is not yet in OFF mode press the Off button at the front of the plinth W...

Страница 111: ...efore touching the pins of the mains plug NOTICE Components in the high voltage circuitry When the microscope especially the gun is fully on an abrupt shutdown of all electrical sup plies may damage s...

Страница 112: ...juries and property damage and voids all rights to warranty claims Only original spare parts from ZEISS may be used DANGER Electric shock due to live parts When the Microscope System is still switched...

Страница 113: ...s Tab 5 Schedule for the change of consumables 6 4 Care and Cleaning Work All care and cleaning work not described here must only be performed by an authorized ZEISS ser vice representative NOTICE Fun...

Страница 114: ...or safety reasons since gun vacuum is worse than the pressure threshold Refer to Baking out the Gun Head 120 Image is bad at low EHT e g 1 kV Working distance is too long Reduce the working distance t...

Страница 115: ...not been identified correctly Restart the microscope If this does not solve the problem contact your local ZEISS service representative If you use a LaB fila ment and gun vac uum is worse than 1 10 mb...

Страница 116: ...onfirm click OK The SmartSEM Administrator window is displayed showing the user list 4 Click Column Stage 5 In the Stage Post Initialisation Position input fields enter the desired position Alternativ...

Страница 117: ...ci men holder touches the chamber walls the detectors or the objective lens the stage is stopped immediately An audible warning sounds and an on screen message is displayed Prerequisite The EM server...

Страница 118: ...ose the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers CAUTION Closing the chamber door Fingers can be...

Страница 119: ...5 bar Procedure 1 To check if the isolation mounts need to be adjusted give the column a gentle nudge If the column is able to move freely then skip the subsequent steps no further action is re quired...

Страница 120: ...e Status Bar click The pop up menu for vacuum gun and EHT activation is displayed 2 Click Shutdown Gun 3 Wait until the gun has ramped down This may take up to 5 minutes 7 2 1 2 Switching off the Gun...

Страница 121: ...g select Quick For 8 hours heating 2 hours cooling select Overnight For 40 hours heating 3 hours cooling select Weekend For a cycle defined by the operator select User INFO You can switch to Standby m...

Страница 122: ...the Filament Holder Unpacking a New Filament Installing the Filament to the Filament Holder Venting the Gun and the Specimen Chamber De energizing the Microscope Disassembling the Gun Disassembling t...

Страница 123: ...ungsten Not Pre Aligned and LaB 133 8 Unpacking a New Filament Tungsten Not Pre Aligned 134 9 Installing the Filament to the Filament Holder Tungsten Not Pre Aligned and LaB 136 10 Installing the Fila...

Страница 124: ...ecimen Chamber In order to replace the filament you need to disassemble the gun Before you can disassemble the gun you need to prepare the microscope You need to switch off the gun and to vent the mic...

Страница 125: ...e or in OFF mode refer to Finishing the Work Session LaB Filament 108 or Finishing the Work Session Tungsten Filament 108 Procedure 1 If the microscope is not yet in OFF mode press the Off button at t...

Страница 126: ...instructions provided by the pump manufacturer CAUTION Hot firing unit During operation the firing unit gets hot If you touch the hot firing unit you may burn your self 4 After you switch off the micr...

Страница 127: ...uum 4 Wear lint free gloves throughout the whole procedure of replacing the filament Parts and Tools Lint free gloves Hex key 1 5 mm Prerequisite The gun is disassembled Procedure 1 Use a hex key 1 5...

Страница 128: ...nd drop into your hand 7 2 2 1 5 Cleaning the Firing Unit Over time the filament deposits material on the firing unit and the anode This can damage the aperture and reduce the filament life time You n...

Страница 129: ...ing unit in a circular mo tion 3 Wrap a piece of cotton around the tip of a toothpick 4 Use the wrapped side of the toothpick to polish the inside of the firing unit 5 Use the other side of the toothp...

Страница 130: ...Clean for 3 5 minutes INFO If an ultrasonic bath is not available clean the firing unit with plenty of solvent and a clean piece of cotton Repeat for at least 3 times 7 2 2 1 6 Cleaning the Anode Ove...

Страница 131: ...e the screws as they will be removed with the anode later 2 Use long reach flexible tweezers to carefully re move the anode along with the retaining screws 3 Close the gun lid to prevent ingress of du...

Страница 132: ...sure the aperture is completely free from any polishing paste 8 Completely remove any remaining traces of polish and surface contamination in an ultra sonic bath Completely immerse the firing unit in...

Страница 133: ...lament to the filament holder you first need to disassemble the fila ment holder NOTICE Contamination by dust particles or fingerprints Dust particles or skin grease can cause contaminations which lea...

Страница 134: ...ring every filament exchange For gen eral guidelines on polishing metal parts refer to Cleaning the Firing Unit 128 7 2 2 3 2 Unpacking a New Filament Tungsten Not Pre Aligned NOTICE Contamination by...

Страница 135: ...ust particles or skin grease can cause contaminations which lead to flashovers or to bad vac uum 4 Wear lint free gloves throughout the whole procedure of replacing the filament Parts and Tools LaB fi...

Страница 136: ...d filament you can install a new filament NOTICE Contamination by dust particles or fingerprints Dust particles or skin grease can cause contaminations which lead to flashovers or to bad vac uum 4 Wea...

Страница 137: ...ent holder If you do not use a pre aligned filament you also need to install the tensator spring washer 2 1 Fig 45 Filament holder and tensator spring washer 1 Filament holder 2 Tensator spring washer...

Страница 138: ...e firing unit INFO The tensator spring washer is not designed to be used in combination with pre aligned filaments If you install the tensator spring washer in combination with a pre aligned filament...

Страница 139: ...ing washer you need to screw it in with the correct number of turns The number of turns affects the filament distance and the possible applications according to the following table Number of turns Fil...

Страница 140: ...e filament is flush with the top of the firing unit 3 Use a stereo light microscope or hand lens to check that the filament is centered and is flush with the top of the firing unit 4 If the filament i...

Страница 141: ...d or if the filament distance is not correctly adjusted then this may negatively affect the filament lifetime and the performance NOTICE Contamination by dust particles or fingerprints Dust particles...

Страница 142: ...ilament centered 7 2 2 4 5 Reinstalling the Firing Unit to the Gun Before you can reinstall the gun to the microscope you need to install the firing unit to the gun NOTICE Contamination by dust partic...

Страница 143: ...led to the gun Procedure 1 If your microscope is equipped with a column safety switch check that the safety switch is correctly lined up when you close the gun 2 Check the O ring and use the can of co...

Страница 144: ...oscope and start up the filament Prerequisite You have energized and started the microscope Procedure 1 In the SEM Controls panel select the Gun Vacuum tab 2 Evacuate the microscope via Pump 3 Wait un...

Страница 145: ...e start up may take a bit of time This is intended and does minimize damage to the new filament due to thermal shock 7 2 2 5 2 Aligning the Emission Image To achieve an optimal alignment of the beam y...

Страница 146: ...her until the second and final emission peak becomes visi ble Adjust Brightness and Contrast to optimize the visualization 6 In the Apertures tab of the SEM Controls panel use Gun Tilt and Gun Shift t...

Страница 147: ...breakers F10 F11 on the rear side of the plinth are tripped 2 If the circuit breaker is tripped push the circuit breaker upwards 7 4 PC 7 4 1 Cleaning up the PC It is important to periodically clean...

Страница 148: ...ided by the pump manufacturer WARNING Biological hazards Biological substances may pose a threat to the health of humans and other living organisms 4 Keep a logbook of the biological substances loaded...

Страница 149: ...sufficiently ventilated 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bi...

Страница 150: ...ed to handle its full weight and di mensions Note the weight information on the package and on the shipping document Where possible the original packaging must be used for shipping or transport Forkli...

Страница 151: ...ope System and its components must not be disposed of as domestic waste or through municipal disposal companies They must be disposed of in accordance with applicable regulations WEEE Directive 2012 1...

Страница 152: ...ins power supply 120 V 50 60 Hz 16 A 1 N PE or 230 V 50 60 Hz 16 A 1 N PE 2 Pre vacuum pump Equipotential bonding bar grounding screw terminal 8 mm 3 Pre vacuum pump 2 optional Additional standard loc...

Страница 153: ...the availability of the requested supplies is the responsibility of the customer and has to be provided at the time of installation Due to continuous development we reserve the right to change specif...

Страница 154: ...tion to the main distribution panel Nominal frequency 50 60 Hz Main Power Plug The microscope is delivered with a power cord 3 m long equipped with a CEE plug 1 N PE according to IEC 60309 depending o...

Страница 155: ...type at house installation 16 A Type C Protection class Class I Momentary interruption Less than a half cycle Ampere interrupting capacity AIC Min 10 000 Arms Location Requirements Parameter Requireme...

Страница 156: ...ment Electrical field The microscope is a class A device industrial The microscope is de signed to operate in a controlled electromagnetic environment This means that devices with RF transmitters such...

Страница 157: ...interface operated by mouse and keyboard Windows 10 multilingual operating system Specimen Chamber and Stage Parameter Description Specimen chamber dimensions 310 mm inner diameter 220 mm height Anal...

Страница 158: ...ly for VP mode Cascade Current Detector with floating amplifier electronics for en hanced imaging in Variable Pressure mode up to 133 Pa Delivers de tail at low kV for specimens that demand higher pre...

Страница 159: ...ight and Sizes Main Components Length mm Width mm Height mm Weight kg Plinth column 807 1031 1780 650 Overall 1930 1781 1780 720 Air Conditioning and Quality Parameter Value Temperature range for oper...

Страница 160: ...igh leakage currents are present in the mi croscope Therefore the microscope has to be connected to a separate protective ground An exclusive grounding connection to earth must be provided as part of...

Страница 161: ...specimen chamber with chamber door open Pressure 0 2 3 3 bar Quality 4 6 with nitrogen content 99 996 Connection hose 4 mm inside diameter 10 m are delivered with the microscope Instrument con nectio...

Страница 162: ...AWD of 8 5 mm Maximum 40 mm diameter at the longest working distance X ray analysis 8 5 mm AWD and 35 take off angle Optibeam modes Resolution Depth Analysis Field Fisheye Image framestore 32768 24576...

Страница 163: ...ode lower than 2 mPa 2 10 mbar VP mode optional 10 400 Pa EasyVP mode optional 10 133 Pa EP mode optional 10 3000 Pa Detection System Parameter Description Chamber detectors SE detector Everhart Thorn...

Страница 164: ...ed near win dows with direct sunlight or radiators Compliance with the installation requirements of the Mi croscope System and the availability of the requested supplies is the responsibility of the c...

Страница 165: ...A yellow or for 230 VAC a CEE MALE PLUG 2P3W 6 h 16 A blue The building installation should provide the corresponding CEE socket 1 N PE with de sired approvals of the country used either for 120 VAC...

Страница 166: ...rements Parameter Requirement Installation site Exclusively inside buildings Recommended room size Min 3 6 m 4 0 m 2 3 m Service area Min 0 8 m at each side Entrance Min 0 8 m wide Hallways Min 1 0 m...

Страница 167: ...ment This means that devices with RF transmitters such as mobile phones or DECT phones must not be used in close proximity Vibrations Less than 6 m sec rms from 0 30 Hz Less than 12 m sec rms above 30...

Страница 168: ...mm Specimen stage Type 5 axes motorized Cartesian controlled via the SmartSEM user interface or operated by a dual joystick control box Mounting Drawer type door Movements X 130 mm Y 130 mm Z 50 mm 8...

Страница 169: ...oly mers bio specimens pharmaceuticals powders and fibers Enhanced signal to noise ratio versus VPSE detector C2DX optional only for VP mode Extended Cascade Current Detector HDBSD detector optional B...

Страница 170: ...nt or comparable standard It also comply as applicable with the EU regulations 2011 65 EU RoHS and 2012 19 EU WEEE The resulting EMC environment can change through the use installation of 3rd party co...

Страница 171: ...ive 10 1 Consumables Required Parts Tools Part Number 100 m VP aperture 350700 0700 000 400 m EasyVP aperture 354720 1464 000 Tungsten filaments set of 10 350010 2079 000 Tungsten filaments longlife s...

Страница 172: ...ts and Tools 10 3 Tools and Accessories ZEISS Required Parts Tools Part Number Toolbox including VP apertures and removal tools 350600 0926 000 172 Instruction Manual ZEISS EVO en US Rev 10 354706 078...

Страница 173: ...ered Electron C2D Cascade Current Detector C2DX Extended Cascade Current Detector CAN Controller Area Network CCD Charge Coupled Device CL Cathodoluminescence Condenser Device that collects and focuse...

Страница 174: ...rons that hit the specimen surface R R axis Rotation RF Radio Frequency SCD Specimen Current Detector Scintillator Substance that absorbs electrons and in response fluoresces photons while re leasing...

Страница 175: ...of electron microscopes Y Y axis YAG Yttrium Aluminum Garnet Z Z axis ZEISS ZEISS is an internationally leading tech nology enterprise operating in the fields of optics and optoelectronics Further in...

Страница 176: ...otective 18 D Decontamination 151 Depth mode 29 Detection System 158 163 169 Detector 32 82 BSD 43 85 C2D 42 83 C2DX 85 CL 46 Everhart Thornley 33 SE 33 83 STEM 45 VPSE 39 YAG BSD 44 87 Differential p...

Страница 177: ...n mode 29 S Safe Operating Condition 10 Safety 9 112 devices 18 interlocks 18 Safety label 14 Sample type selection 92 Saving images 79 Scintillator 113 SE detector 33 83 Secondary electron 31 Shortcu...

Страница 178: ...e 50 User privilege 52 V Vacuum system 22 Variable pressure mode 23 VP mode 23 VPSE detector 39 W Warning labels 13 lights 13 Weight and Sizes 153 159 164 Y YAG BSD detector 44 87 Z ZEISS Portal 8 Ser...

Страница 179: ......

Страница 180: ...H Carl Zeiss Promenade 10 07745 Jena Germany phone 49 1803 33 63 34 fax 49 3641 64 3439 info microscopy de zeiss com www zeiss com microscopy Instruction Manual ZEISS EVO en US Rev 10 Modifications re...

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