Zeiss EVO, Инструкция по эксплуатации, Страница: 4 / 180

​ Table of Contents​ ZEISS
5 First Operating Steps ...................................................................... 56
5.1 Prerequisites for Commissioning and Operation .................................................. 56
5.2 Switching On the Microscope System.................................................................. 56
5.2.1
Energizing the Microscope .................................................................... 56
5.2.2 Starting the Microscope ........................................................................ 58
5.3 Starting the Software .......................................................................................... 59
5.3.1
Calling up the Help................................................................................ 59
5.3.2 Keyboard Shortcuts............................................................................... 59
5.4 Acquiring an Image............................................................................................. 61
5.4.1
Preparing the Specimen Holder ............................................................. 61
5.4.2 Loading the Specimen Chamber............................................................ 63
5.4.3 Locating the Specimen .......................................................................... 67
5.4.4 Switching on the Gun | LaB₆ Filament ................................................... 68
5.4.5 Switching on the EHT | LaB₆ Filament .................................................... 68
5.4.6 Choosing the LaB₆ Mode ...................................................................... 69
5.4.7 Setting up the LaB₆ Source.................................................................... 70
5.4.8 Switching on the Gun and EHT | Tungsten Filament .............................. 72
5.4.9 Acquiring an Image............................................................................... 73
5.4.10 Optimizing the Image............................................................................ 76
5.4.11 Saving the Image .................................................................................. 79
5.5 Modifying Gun Parameters and Optibeam Mode ................................................ 79
5.5.1
Using the Automatic Gun Alignment Functions ..................................... 79
5.5.2 Using the Auto Aperture Alignment Function ........................................ 80
5.5.3 Setting the Probe Current...................................................................... 81
5.5.4 Measuring the Probe Current ................................................................ 81
5.5.5 Selecting the Optibeam Operation Mode .............................................. 81
5.6 Finding Appropriate Detector Settings................................................................. 82
5.6.1
Selecting a Detector .............................................................................. 82
5.6.2 Setting up the SE Detector .................................................................... 83
5.6.3 Setting up the C2D Detector ................................................................. 83
5.6.4 Setting up the C2DX Detector ............................................................... 84
5.6.5 Setting up the BSD Detector.................................................................. 85
5.6.6 Setting up the YAG BSD Detector.......................................................... 87
5.6.7 Using the Variable Stage Bias ................................................................ 88
5.7 Working with Specific Specimen Types................................................................ 91
5.7.1
Conductive Specimen............................................................................ 91
5.7.2 Non-conductive Specimen..................................................................... 93
5.7.3 Hydrated Specimen ............................................................................... 97
5.8 Switching Off the Microscope System .................................................................108
5.8.1
Finishing the Work Session | LaB₆ Filament............................................ 108
5.8.2 Finishing the Work Session | Tungsten Filament..................................... 108
5.8.3 Closing the SmartSEM User Interface .................................................... 109
5.9 De-energizing the Microscope.............................................................................110
5.10 Performing an Emergency Shutdown ..................................................................111
6 Care and Maintenance ....................................................................112
6.1 Safety During Cleaning and Maintenance............................................................112
6.2 Maintenance Schedule ........................................................................................112
6.3 Maintenance Work .............................................................................................113
6.3.1
Change of Consumables and Chemicals ................................................ 113
6.4 Care and Cleaning Work .....................................................................................113
6.4.1
Cleaning the Microscope....................................................................... 113
4 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006