Zeiss EVO, Инструкция по эксплуатации, Страница: 80 / 180

5 First Operating Steps | 5.5 Modifying Gun Parameters and Optibeam Mode ZEISS
§ Standard Align uses the normal imaging mode to align the gun.
§
Advanced Align uses the emission image to align the gun.
Procedure 1. From the Panel Configuration Bar , select Gun Alignment .
à
The Gun Alignment dialog is displayed.
2. To automatically align the gun with the help of the emission image, click Advanced Align .
3. To automatically align the gun with the help of the normal imaging mode, click Standard
Align .
5.5.2 Using the Auto Aperture Alignment Function
Auto aperture align is used to improve the quality of the images. When the aperture align is se-
lected the software automatically aligns the beam with respect to the EasyVP aperture.
Prerequisite
ü
The EasyVP aperture is fitted.
Procedure 1. From the Panel Configuration Bar , select Aperture Align .
à
The Aperture Align dialog is displayed.
2. Set the preferred imaging conditions (example EHT = 10 kV, WD = 8.5 mm, and
Iprobe = 300 pA) and obtain an image.
3. Click Auto Aperture Align button.
à
The software starts aligning the beam and the progress bar is displayed on the panel. A
full size image is displayed when the alignment is completed.
80 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006