Zeiss EVO, Инструкция по эксплуатации, Страница: 99 / 180

ZEISS 5 First Operating Steps | 5.7 Working with Specific Specimen Types
Info
The 500 µm beamsleeve allows EP pressures up to 3000 Pa, but only 0.5 mm maximum field
of view.
The 1000 µm beamsleeve allows EP pressures up to 1000 Pa, and 1 mm maximum field of
view.
Fig. 43: 100 μm EP aperture and 500 μm beamsleave aperture
Prerequisite
ü
The microscope is equipped with the EP mode option.
Procedure 1. In the SEM Controls panel, select the Vacuum tab.
2. To vent the specimen chamber, click Vent .
3. If a lens-installed BSD is fitted, remove the BSD
and place it in the parked position.
4. Retract all retractable detectors.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 99