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ZEISS 3 Product and Functional Description | 3.3 Detectors
3.2.1 Optibeam Modes
The EVO column offers the following Optibeam modes:
Analysis mode Field mode Resolution
mode Depth mode Fisheye mode
The specimen
remains in focus
for any change
in probe cur-
rent. A larger field of
view for naviga-
tion and a large
depth of field. Smallest probe
diameter for a
chosen probe
current at any
working dis-
tance or accel-
eration voltage. Largest depth
of field for a
chosen probe
current, at any
working dis-
tance or accel-
eration voltage. Largest field of
view for naviga-
tion and a very
large depth of
field.
Tab. 4: Optibeam modes and their beam paths
3.3 Detectors
This chapter describes the generation of secondary and backscattered electrons, and describes
how the detector types, that are available for use with the microscope, use these electrons to pro-
vide imaging, topographical, and other information. It also lists some characteristics of each de-
tector type.
For more information about any of the detectors, contact your local ZEISS service representative.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 29