Zeiss EVO, Инструкция по эксплуатации, Страница: 3 / 180

ZEISS Table of Contents
Table of Contents
1 General Information........................................................................ 6
1.1 Text Conventions and Link Types ........................................................................ 6
1.2 Explanation of Warning Messages and Additional Information............................ 7
1.3 Further Applicable Documents ............................................................................ 8
1.4 Contact............................................................................................................... 8
2 Safety ............................................................................................. 9
2.1 Intended Use ...................................................................................................... 9
2.2 General Safety Information ................................................................................. 10
2.2.1
Requirements for Operators .................................................................. 10
2.2.2 Safe Operating Condition...................................................................... 10
2.3 Prevention of Hazards ......................................................................................... 11
2.3.1
Mechanical Hazards .............................................................................. 11
2.3.2 Electrical Hazards .................................................................................. 11
2.3.3 Hazards generated by Materials and Substances ................................... 12
2.3.4 Hazards generated by Radiation............................................................ 13
2.3.5 Thermal Hazards ................................................................................... 13
2.4 Warning Labels and Lights .................................................................................. 13
2.4.1
Warning Labels ..................................................................................... 14
2.5 Safety Devices and Interlocks .............................................................................. 18
2.5.1
Protective Cover Panels ......................................................................... 18
2.5.2 Main Disconnect Device ........................................................................ 19
2.5.3 Circuit Breaker ...................................................................................... 19
2.5.4 Locking Devices .................................................................................... 20
3 Product and Functional Description ................................................ 21
3.1 Vacuum System .................................................................................................. 22
3.1.1
Variable Pressure Modes ....................................................................... 23
3.2 Electron Optical Column...................................................................................... 27
3.2.1
Optibeam Modes .................................................................................. 29
3.3 Detectors ............................................................................................................ 29
3.3.1
Principle of Signal Detection.................................................................. 30
3.3.2 Detectors Overview............................................................................... 32
3.3.3 SE Detector ........................................................................................... 33
3.3.4 Chamber CCD Camera .......................................................................... 37
3.4 Specimen Stage .................................................................................................. 38
3.5 Optional Components and Accessories................................................................ 39
3.5.1
Optional Detectors ................................................................................ 39
3.5.2 Dual Joystick ......................................................................................... 47
3.5.3 Control Panel ........................................................................................ 48
3.6 Software Description........................................................................................... 50
3.6.1
SmartSEM User Interface....................................................................... 50
3.6.2 Graphical Control Elements ................................................................... 51
3.6.3 User Access Levels and User Privileges................................................... 52
3.6.4 SmartSEM Program Suite ...................................................................... 53
4 Installation...................................................................................... 55
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 3